Wong, Joyce and Scherer, Axel and George, Thomas (1997) Surface micromachined membranes for tunnel transducers. Journal of Vacuum Science and Technology B, 15 (6). pp. 2768-2772. ISSN 1071-1023. doi:10.1116/1.589724. https://resolver.caltech.edu/CaltechAUTHORS:WONjvstb97
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Abstract
We have developed low-temperature surface micromachining procedures for the fabrication of suspended SiO2/Si3N4 membranes. This fabrication method was integrated with electron beam lithography, anisotropic ion etching, and electroplating to construct electrostatically deflectable tunnel transducers. We show the structures and some preliminary measurements on the performance of these monolithic devices.
| Item Type: | Article | ||||||
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| Additional Information: | © 1997 American Vacuum Society. Received 30 May 1997; accepted 31 July 1997. This work was funded by the National Science Foundation and the Army Research Office. | ||||||
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| Subject Keywords: | transducers, tunnelling, micromachining, membranes, silicon compounds | ||||||
| Issue or Number: | 6 | ||||||
| DOI: | 10.1116/1.589724 | ||||||
| Record Number: | CaltechAUTHORS:WONjvstb97 | ||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:WONjvstb97 | ||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||
| ID Code: | 12213 | ||||||
| Collection: | CaltechAUTHORS | ||||||
| Deposited By: | Archive Administrator | ||||||
| Deposited On: | 29 Oct 2008 06:10 | ||||||
| Last Modified: | 08 Nov 2021 22:26 |
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