Ho, K. T. and Lien, C.-D. and Shreter, U. and Nicolet, M-A. (1985) An inert marker study for palladium silicide formation: Si moves in polycrystalline Pd2Si. Journal of Applied Physics, 57 (2). pp. 227-231. ISSN 0021-8979. http://resolver.caltech.edu/CaltechAUTHORS:HOKjap85b
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Abstract
A novel use of Ti marker is introduced to investigate the moving species during Pd2Si formation on <111> and <100> Si substrates. Silicide formed from amorphous Si is also studied using a W marker. Although these markers are observed to alter the silicide formation in the initial stage, the moving species can be identified once a normal growth rate is resumed. It is found that Si is the dominant moving species for all three types of Si crystallinity. However, Pd will participate in mass transport when Si motion becomes obstructed.
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| Additional Information: | Copyright © 1985 American Institute of Physics. Received 13 June 1984; accepted 1 August 1984. The authors would like to acknowledge Ali Ghaffari for technical assistance. The implanter part of this study was financially supported by the U.S. Department of Energy through an agreement with the National Aeronautics and Space Administration and monitored by the Jet Propulsion Laboratory, California Institute of Technology (D. Burger). | |||||||||
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| Subject Keywords: | SILICON, PALLADIUM SILICIDES, TITANIUM, TUNGSTEN, PALLADIUM, SYNTHESIS, ATOM TRANSPORT, SELF−DIFFUSION | |||||||||
| Record Number: | CaltechAUTHORS:HOKjap85b | |||||||||
| Persistent URL: | http://resolver.caltech.edu/CaltechAUTHORS:HOKjap85b | |||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | |||||||||
| ID Code: | 12602 | |||||||||
| Collection: | CaltechAUTHORS | |||||||||
| Deposited By: | Archive Administrator | |||||||||
| Deposited On: | 15 Dec 2008 18:04 | |||||||||
| Last Modified: | 26 Dec 2012 10:36 |
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