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Design, fabrication, and testing of silicon microgimbals for super-compact rigid disk drives

Temesvary, Viktoria and Wu, Shuyun and Hsieh, Wen H. and Tai, Yu-Chong and Miu, Denny K. (1995) Design, fabrication, and testing of silicon microgimbals for super-compact rigid disk drives. Journal of Microelectromechanical Systems, 4 (1). pp. 18-27. ISSN 1057-7157. doi:10.1109/84.365366.

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This paper documents results related to design optimization, fabrication process refinement, and micron-level static/dynamic testing of silicon micromachined microgimbals that have applications in super-compact computer disk drives as well as many other engineering applications of microstructures and microactuators requiring significant out-of-plane motions. The objective of the optimization effort is to increase the in-plane to out-of-plane stiffness ratio in order to maximize compliance and servo bandwidth and to increase the displacement to strain ratio to maximize the shock resistance of the microgimbals, while that of the process modification effort is to simplify in order to reduce manufacturing cost. The testing effort is to characterize both the static and dynamic performance using precision instrumentation in order to compare various prototype designs.

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Tai, Yu-Chong0000-0001-8529-106X
Additional Information:“©1995 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.” Manuscript received November 26, 1993; revised November 20, 1994. This work was supported by the University of California MICRO Program and matching funds from Applied Magnetics, Hewlett-Packard, IBM, Maxtor, Quantum, and Seagate Technology.
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Deposited On:06 Jan 2006
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