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Pure-Silica-Zeolite MFI and MEL Low-Dielectric-Constant Films with Fluoro-Organic Functionalization

Lew, Christopher M. and Li, Zijian and Li, Shuang and Hwang, Son-Jong and Liu, Yan and Medina, Dora I. and Sun, Minwei and Wang, Junlan and Davis, Mark E. and Yan, Yushan (2008) Pure-Silica-Zeolite MFI and MEL Low-Dielectric-Constant Films with Fluoro-Organic Functionalization. Advanced Functional Materials, 18 (21). pp. 3454-3460. ISSN 1616-301X.

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The synthesis of organic-functionalized pure-silica-zeolites (PSZs) with MFI- and MEL-type structures for low-k applications prepared through a direct-synthesis method by adding a fluorinated silane to the synthesis solution is reported. The added fluorine functionality increases the hydrophobicity of the zeolites, which are characterized by scanning electron microscopy, X-ray diffraction, 29Si and 19F solid-state NMR spectroscopy, nitrogen adsorption, and thermogravimetric analysis. The functionalized zeolite powders have low water content and calcined spin-on films prepared from the functionalized nanoparticle suspensions exhibit higher water contact angles and lower k values (2.1 and 1.8 for the functionalized MFI- and MEL-type zeolites, respectively) than PSZ films. The use of a direct-synthesis method to decrease the moisture adsorption in the films eliminates the extra post-spin-on silylation steps that are traditionally used to render the zeolite films hydrophobic.

Item Type:Article
Related URLs:
URLURL TypeDescription 10.1002/adfm.200800390DOIArticle
Hwang, Son-Jong0000-0002-3210-466X
Liu, Yan0000-0002-5837-4908
Davis, Mark E.0000-0001-8294-1477
Additional Information:© 2008 WILEY-VCH. Received: March 18, 2008; Revised: June 26, 2008; Published online: October 21, 2008. The authors thank AMD, Engelhard, UC Discovery grant, and the National Science Foundation (grant CTS-0404376) for their financial support, Stephen McDaniel from the Central Facility for Advanced Microscopy and Microanalysis of UCR for help with TEM, and Jacqueline Wong for her help with the capacitance measurement system. Supporting Information is available online from Wiley InterScience or from the author.
Funding AgencyGrant Number
University of California, RiversideUNSPECIFIED
Subject Keywords:dielectrics • hydrophobicity • nanocrystals • zeolites
Issue or Number:21
Record Number:CaltechAUTHORS:LEWafm08
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:12758
Deposited By: Archive Administrator
Deposited On:22 Dec 2008 22:42
Last Modified:09 Mar 2020 13:19

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