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Floating-Disk Parylene Microvalves for Self-Pressure-Regulating Flow Controls

Chen, Po-Jui and Rodger, Damien C. and Humayun, Mark S. and Tai, Yu-Chong (2008) Floating-Disk Parylene Microvalves for Self-Pressure-Regulating Flow Controls. Journal of Microelectromechanical Systems, 17 (6). pp. 1352-1361. ISSN 1057-7157. doi:10.1109/JMEMS.2008.2004947.

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This paper presents the first parylene-based floating-disk microvalve with self-pressure-regulating characteristics for various microfluidic applications. By incorporating a free-floating disk diaphragm with no anchoring/tethering structures to constrain its movement, the microvalve realizes configurable pressure-based flow-shunting functions in a stand-alone fashion. Its passive operation eliminates the need for power sources or the external actuation of the device. A multilayer polymer surface-micromachining technology is utilized for device fabrication by exploiting parylene C (poly-chloro-p-xylylene) as the biocompatible structural material for high mechanical compliance as compared with other conventional thin-film materials. Experimental results successfully demonstrate that the in-channel microvalves control water flows in the following two different shunt designs: 1) a nearly ideal regular check valve with zero forward-cracking pressure, zero reverse leakage, and 1.25 x 10^13 - 2.09 x 10^13 N·s/m^5 (0.03–0.05 psi·min/μL, 1.55–2.59 mmHg·min/μL) of fluidic resistance; and 2) a pressure–bandpass check valve with 0–100 mmHg and 0–10 μL/min of pressure and flow rate regulation ranges, respectively, as well as 4.88 x 10^13 N·s/m^5 (0.12 psi·min/μL, 6.08 mmHg·min/μL) of fluidic resistance in the forward conductive region. Such a biocompatible and implantable microvalve has the great potential of being integrated in microfluidic systems to facilitate effective microflow control for lab-on-a-chip and biomedical applications.

Item Type:Article
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URLURL TypeDescription
Rodger, Damien C.0000-0002-1583-5946
Humayun, Mark S.0000-0002-5830-5208
Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 2008 IEEE. Reprinted with permission. Manuscript received March 3, 2008; revised June 23, 2008. First published October 28, 2008; current version published December 4, 2008. This work was supported in part by the Engineering Research Centers Program of the National Science Foundation under NSF Award EEC-0310723 and in part by Bausch and Lomb. Earlier versions of this paper were presented at the 20th IEEE International Conference on Micro Electro Mechanical Systems, Kobe, Japan, January 21–25, 2007, and the 21st IEEE International Conference on Micro Electro Mechanical Systems, Tucson, AZ, January 13–17, 2008. Subject Editor Y. Zohar. The authors would like to thank J. Shih for his valuable comments on fluidic measurements and analysis and T. Roper for his fabrication assistance.
Funding AgencyGrant Number
Bausch and LombUNSPECIFIED
Subject Keywords:Flow control; fluidics; mechanical engineering; microelectromechanical devices; micromachining; valves
Issue or Number:6
Record Number:CaltechAUTHORS:CHEjmems08b
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:12924
Deposited By: Archive Administrator
Deposited On:09 Jan 2009 23:54
Last Modified:08 Nov 2021 22:34

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