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Sensitive detection of nanomechanical motion using piezoresistive signal downmixing

Bargatin, I. and Myers, E. B. and Arlett, J. and Gudlewski, B. and Roukes, M. L. (2005) Sensitive detection of nanomechanical motion using piezoresistive signal downmixing. Applied Physics Letters, 86 (13). Art. no. 133109. ISSN 0003-6951. doi:10.1063/1.1896103.

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We have developed a method of measuring rf-range resonance properties of nanoelectromechanical systems (NEMS) with integrated piezoresistive strain detectors serving as signal downmixers. The technique takes advantage of the high strain sensitivity of semiconductor-based piezoresistors, while overcoming the problem of rf signal attenuation due to a high source impedance. Our technique also greatly reduces the effect of the cross-talk between the detector and actuator circuits. We achieve thermomechanical noise detection of cantilever resonance modes up to 71 MHz at room temperature, demonstrating that downmixed piezoresistive signal detection is a viable high-sensitivity method of displacement detection in high-frequency NEMS.

Item Type:Article
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Roukes, M. L.0000-0002-2916-6026
Additional Information:© 2005 American Institute of Physics (Received 27 September 2004; accepted 14 February 2005; published online 24 March 2005) The authors thank S. Stryker for assistance with construction of the experimental apparatus. We are grateful for support of this work from the NSF sECS-0089061d and DARPA sDSO-MOSAIC N00014-02-1-0602 and MTO/SPAWAR N66001-02-1-8914d.
Funding AgencyGrant Number
Office of Naval Research (ONR)N00014-02-1-0602
Office of Naval Research (ONR)N66001-02-1-8914
Defense Advanced Research Projects Agency (DARPA)UNSPECIFIED
Subject Keywords:strain sensors; piezoresistive devices; displacement measurement; nanotechnology; sensitivity; crosstalk; micromechanical devices
Issue or Number:13
Record Number:CaltechAUTHORS:BARapl05
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:1298
Deposited By: Archive Administrator
Deposited On:09 Jan 2006
Last Modified:08 Nov 2021 19:09

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