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Wafer-bonded single-crystal silicon slot waveguides and ring resonators

Briggs, Ryan M. and Shearn, Michael and Scherer, Axel and Atwater, Harry A. (2009) Wafer-bonded single-crystal silicon slot waveguides and ring resonators. Applied Physics Letters, 94 (2). Art. No. 021106. ISSN 0003-6951. doi:10.1063/1.3070541.

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We fabricated horizontal Si slot waveguides with a 25 nm SiO2 slot layer by bonding thin Si-on-insulator wafers. After removing the Si substrate and buried oxide from one side of the bonded structure, grating-coupled waveguides and ring resonators were partially etched into the Si/SiO2/Si device layers. The gratings exhibit efficiencies of up to 23% at 1550 nm and the ring resonators were measured to have loaded quality factors near 42 000 for the lowest-order transverse-electric mode, corresponding to a propagation loss of 15 dB/cm. The leaky lowest-order transverse-magnetic mode was also observed with a propagation loss of 44 dB/cm.

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Atwater, Harry A.0000-0001-9435-0201
Additional Information:© 2009 American Institute of Physics. Received 9 October 2008; accepted 21 December 2008; published 13 January 2009. The authors gratefully acknowledge H.J. Lezec and M.J. Archer for TEM assistance. R.M.B. also acknowledges the support of the NDSEG Fellowship and M.S. thanks the NSF for his Graduate Research Fellowship. This project was funded by the AFOSR under MURI Award No. FA9550-06-1-0470 as well as by the Kavli Nanoscience Institute and DARPA under EPIC Program No. HR0011-04-10054, and it made use of the facilities of the Center for Science and Engineering of Materials, an NSF MRSEC.
Group:Kavli Nanoscience Institute
Funding AgencyGrant Number
National Defense Science and Engineering Graduate (NDSEG) FellowshipUNSPECIFIED
Air Force Office of Scientific ResearchFA9550-06-1-0470
Kavli Nanoscience InstituteUNSPECIFIED
Defense Advanced Research Projects Agency (DARPA)HR0011-04-10054
Subject Keywords:diffraction gratings, elemental semiconductors, integrated optics, optical losses, optical resonators, optical waveguides, Q-factor, silicon, silicon compounds, silicon-on-insulator
Issue or Number:2
Record Number:CaltechAUTHORS:BRIapl09
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:13107
Deposited By: Archive Administrator
Deposited On:21 Jan 2009 18:14
Last Modified:08 Nov 2021 22:35

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