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Efficient and Sensitive Capacitive Readout of Nanomechanical Resonator Arrays

Truitt, Patrick A. and Hertzberg, Jared B. and Huang, C. C. and Ekinci, Kamil L. and Schwab, Keith C. (2007) Efficient and Sensitive Capacitive Readout of Nanomechanical Resonator Arrays. Nano Letters, 7 (1). pp. 120-126. ISSN 1530-6984. doi:10.1021/nl062278g.

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Here we describe all-electronic broadband motion detection in radio frequency nanomechanical resonators. Our technique relies upon the measurement of small motional capacitance changes using an LC impedance transformation network. We first demonstrate the technique on a single doubly clamped beam resonator with a side gate over a wide range of temperatures from 20 mK to 300 K. We then apply the technique to accomplish multiplexed readout of an array of individually addressable resonators, all embedded in a single high-frequency circuit. This technique may find use in a variety of applications ranging from ultrasensitive mass and force sensing to quantum information processing.

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Schwab, Keith C.0000-0001-8216-4815
Additional Information:© 2007 American Chemical Society. Received September 27, 2006. Revised Manuscript Received November 12, 2006. Publication Date (Web): December 6, 2006. We acknowledge fruitful conversations with Dr. A. Vandelay and Prof. E. von Nostrand. C.C.H. and K.L.E. acknowledge support from the U.S. NSF under grants nos. BES-216274 and CMS-324416.
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Official Citation:Efficient and Sensitive Capacitive Readout of Nanomechanical Resonator Arrays Patrick A. Truitt,, Jared B. Hertzberg,, C. C. Huang,, Kamil L. Ekinci, and, Keith C. Schwab, Nano Letters 2007 7 (1), 120-126
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:15760
Deposited By: George Porter
Deposited On:07 Oct 2009 21:16
Last Modified:08 Nov 2021 23:22

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