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High reflectivity high-Q micromechanical Bragg mirror

Böhm, H. R. and Gigan, S. and Blaser, F. and Zeilinger, A. and Aspelmeyer, M. and Langer, G. and Bäuerle, D. and Hertzberg, J. B. and Schwab, K. C. (2006) High reflectivity high-Q micromechanical Bragg mirror. Applied Physics Letters, 89 (22). Art. No. 223101. ISSN 0003-6951.

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The authors report on the fabrication and characterization of a micromechanical oscillator consisting only of a freestanding dielectric Bragg mirror with high optical reflectivity and high mechanical quality. The fabrication technique is a hybrid approach involving laser ablation and dry etching. The mirror has a reflectivity of 99.6%, a mass of 400 ng, and a mechanical quality factor Q of approximately 10^4. Using this micromirror in a Fabry-Pérot cavity, a finesse of 500 has been achieved. This is an important step towards designing tunable high-Q high-finesse cavities on chip.

Item Type:Article
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Schwab, K. C.0000-0001-8216-4815
Additional Information:©2006 American Institute of Physics. Received 28 July 2006; accepted 13 October 2006; published 27 November 2006. The authors would like to thank Heidi Piglmayer-Brezina for fabricating the masks for the laser ablation. The authors acknowledge financial support by the Austrian Science Fund (FWF) under the programs SFB15 and P16133-N08, by the Austrian NANO Initiative (MNA), by the European Commission under the Integrated Project Qubit Applications (QAP) funded by the IST Directorate under Contract No. 015846, by grant RFP1-06-14 from The Foundational Questions Institute, and by the City of Vienna.
Funding AgencyGrant Number
FWF Der WissenschaftsfondsSFB15
FWF Der WissenschaftsfondsP16133-N08
Austrian NANO Initiative (MNA)UNSPECIFIED
European Commission015846
Foundational Questions Institute (FQXI)RFP1-06-14
City of Vienna (Austria)UNSPECIFIED
Subject Keywords:reflectivity; Q-factor; micromirrors; micromechanical devices; optical fabrication; dielectric devices; laser ablation; etching
Issue or Number:22
Record Number:CaltechAUTHORS:20090911-092251503
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Official Citation:High reflectivity high-Q micromechanical Bragg mirror H. R. Bohm, S. Gigan, F. Blaser, A. Zeilinger, M. Aspelmeyer, G. Langer, D. Bauerle, J. B. Hertzberg, and K. C. Schwab, Appl. Phys. Lett. 89, 223101 (2006), DOI:10.1063/1.2393000
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:15761
Deposited By: George Porter
Deposited On:14 Sep 2009 16:50
Last Modified:03 Oct 2019 01:02

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