Karabalin, R. B. and Feng, X. L. and Roukes, M. L. (2009) Parametric Nanomechanical Amplification at Very High Frequency. Nano Letters, 9 (9). pp. 3116-3123. ISSN 1530-6984. doi:10.1021/nl901057c. https://resolver.caltech.edu/CaltechAUTHORS:20091001-134558903
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Abstract
Parametric resonance and amplification are important in both fundamental physics and technological applications. Here we report very high frequency (VHF) parametric resonators and mechanical-domain amplifiers based on nanoelectromechanical systems (NEMS). Compound mechanical nanostructures patterned by multilayer, top-down nanofabrication are read out by a novel scheme that parametrically modulates longitudinal stress in doubly clamped beam NEMS resonators. Parametric pumping and signal amplification are demonstrated for VHF resonators up to ~ 130 MHz and provide useful enhancement of both resonance signal amplitude and quality factor. We find that Joule heating and reduced thermal conductance in these nanostructures ultimately impose an upper limit to device performance. We develop a theoretical model to account for both the parametric response and nonequilibrium thermal transport in these composite nanostructures. The results closely conform to our experimental observations, elucidate the frequency and threshold-voltage scaling in parametric VHF NEMS resonators and sensors, and establish the ultimate sensitivity limits of this approach.
| Item Type: | Article | |||||||||
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| Additional Information: | © 2009 American Chemical Society. Received April 3, 2009; Revised Manuscript Received June 19, 2009. We thank S. Stryker for help with the experimental apparatus. We thank M. C. Cross, R. Lifshitz, and I. Kozinsky for helpful discussions. We are grateful to C. A. Zorman and M. Mehregany for providing SiC material used in making the devices. We are grateful to J. Arlett for useful comments and discussions. We acknowledge financial support from DARPA/SPAWAR under Grant N66001-02- 1-8914. | |||||||||
| Group: | Kavli Nanoscience Institute | |||||||||
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| Issue or Number: | 9 | |||||||||
| DOI: | 10.1021/nl901057c | |||||||||
| Record Number: | CaltechAUTHORS:20091001-134558903 | |||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20091001-134558903 | |||||||||
| Official Citation: | Parametric Nanomechanical Amplification at Very High Frequency R. B. Karabalin, X. L. Feng, M. L. Roukes Nano Letters 2009 9 (9), 3116-3123 | |||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | |||||||||
| ID Code: | 16155 | |||||||||
| Collection: | CaltechAUTHORS | |||||||||
| Deposited By: | Ruth Sustaita | |||||||||
| Deposited On: | 02 Oct 2009 18:00 | |||||||||
| Last Modified: | 08 Nov 2021 23:24 |
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