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Parametric Nanomechanical Amplification at Very High Frequency

Karabalin, R. B. and Feng, X. L. and Roukes, M. L. (2009) Parametric Nanomechanical Amplification at Very High Frequency. Nano Letters, 9 (9). pp. 3116-3123. ISSN 1530-6984. doi:10.1021/nl901057c.

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Parametric resonance and amplification are important in both fundamental physics and technological applications. Here we report very high frequency (VHF) parametric resonators and mechanical-domain amplifiers based on nanoelectromechanical systems (NEMS). Compound mechanical nanostructures patterned by multilayer, top-down nanofabrication are read out by a novel scheme that parametrically modulates longitudinal stress in doubly clamped beam NEMS resonators. Parametric pumping and signal amplification are demonstrated for VHF resonators up to ~ 130 MHz and provide useful enhancement of both resonance signal amplitude and quality factor. We find that Joule heating and reduced thermal conductance in these nanostructures ultimately impose an upper limit to device performance. We develop a theoretical model to account for both the parametric response and nonequilibrium thermal transport in these composite nanostructures. The results closely conform to our experimental observations, elucidate the frequency and threshold-voltage scaling in parametric VHF NEMS resonators and sensors, and establish the ultimate sensitivity limits of this approach.

Item Type:Article
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Roukes, M. L.0000-0002-2916-6026
Additional Information:© 2009 American Chemical Society. Received April 3, 2009; Revised Manuscript Received June 19, 2009. We thank S. Stryker for help with the experimental apparatus. We thank M. C. Cross, R. Lifshitz, and I. Kozinsky for helpful discussions. We are grateful to C. A. Zorman and M. Mehregany for providing SiC material used in making the devices. We are grateful to J. Arlett for useful comments and discussions. We acknowledge financial support from DARPA/SPAWAR under Grant N66001-02- 1-8914.
Group:Kavli Nanoscience Institute
Funding AgencyGrant Number
Defense Advanced Research Projects AgencyN66001-02-1-8914
Issue or Number:9
Record Number:CaltechAUTHORS:20091001-134558903
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Official Citation:Parametric Nanomechanical Amplification at Very High Frequency R. B. Karabalin, X. L. Feng, M. L. Roukes Nano Letters 2009 9 (9), 3116-3123
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:16155
Deposited By: Ruth Sustaita
Deposited On:02 Oct 2009 18:00
Last Modified:08 Nov 2021 23:24

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