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Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films

Karabalin, R. B. and Matheny, M. H. and Feng, X. L. and Defaÿ, E. and Le-Rhun, G. and Marcoux, C. and Hentz, S. and Andreucci, P. and Roukes, M. L. (2009) Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films. Applied Physics Letters, 95 (10). Art. No. 103111. ISSN 0003-6951. doi:10.1063/1.3216586.

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We demonstrate piezoelectrically actuated, electrically tunable nanomechanical resonators based on multilayers containing a 100-nm-thin aluminum nitride (AlN) layer. Efficient piezoelectric actuation of very high frequency fundamental flexural modes up to ~80 MHz is demonstrated at room temperature. Thermomechanical fluctuations of AlN cantilevers measured by optical interferometry enable calibration of the transduction responsivity and displacement sensitivities of the resonators. Measurements and analyses show that the 100 nm AlN layer employed has an excellent piezoelectric coefficient, d_(31)=2.4 pm/V. Doubly clamped AlN beams exhibit significant frequency tuning behavior with applied dc voltage.

Item Type:Article
Related URLs:
URLURL TypeDescription
Matheny, M. H.0000-0002-3488-1083
Feng, X. L.0000-0002-1083-2391
Hentz, S.0000-0003-0479-9027
Roukes, M. L.0000-0002-2916-6026
Additional Information:© 2009 American Institute of Physics. Received: 22 June 2009; accepted: 23 July 2009; published online: 9 September 2009. We are grateful to G. Villanueva, J.L. Arlett, and J.E. Sader for helpful discussions and Y. Wu for illustration. We acknowledge financial support for this work from DARPA/ MTO and SPAWAR under the Grant No. N66001-07-1-2039.
Group:Kavli Nanoscience Institute
Funding AgencyGrant Number
Defense Advanced Research Projects Agency (DARPA)N66001-07-1-2039
Space and Naval Warfare System Center (SPAWARSYSCEN)UNSPECIFIED
Ontario Ministry of TransportationUNSPECIFIED
Subject Keywords:aluminium compounds, beams (structures), cantilevers, dielectric resonators, multilayers, nanoelectromechanical devices, piezoelectric actuators, piezoelectric thin films, piezoelectricity
Issue or Number:10
Classification Code:PACS:85.85.+j 85.50.-n 77.65.-i 77.55.+f 07.10.Cm
Record Number:CaltechAUTHORS:20091001-140129826
Persistent URL:
Official Citation:Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films R. B. Karabalin, M. H. Matheny, X. L. Feng, E. Defay, G. Le Rhun, C. Marcoux, S. Hentz, P. Andreucci, and M. L. Roukes, Appl. Phys. Lett. 95, 103111 (2009), DOI:10.1063/1.3216586
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:16156
Deposited By: Ruth Sustaita
Deposited On:02 Oct 2009 17:23
Last Modified:08 Nov 2021 23:24

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