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Cavity Optomechanics with Stoichiometric SiN Films

Wilson, D. J. and Regal, C. A. and Papp, S. B. and Kimble, H. J. (2009) Cavity Optomechanics with Stoichiometric SiN Films. Physical Review Letters, 103 (20). p. 207204. ISSN 0031-9007.

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We study high-stress SiN films for reaching the quantum regime with mesoscopic oscillators connected to a room-temperature thermal bath, for which there are stringent requirements on the oscillators' quality factors and frequencies. Our SiN films support mechanical modes with unprecedented products of mechanical quality factor Q_m and frequency ν_m reaching Q_(m)ν_(m) ≃ 2 × 10^(13) Hz. The SiN membranes exhibit a low optical absorption characterized by Im(n)≲ 10^(-5) at 935 nm, representing a 15 times reduction for SiN membranes. We have developed an apparatus to simultaneously cool the motion of multiple mechanical modes based on a short, high-finesse Fabry-Perot cavity and present initial cooling results along with future possibilities.

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Additional Information:© 2009 American Physical Society. Received 31 August 2009; published 13 November 2009. We thank Oskar Painter for valuable insights, especially into the absorption properties of Si3N4, and D. E. Chang for helpful discussions. This work was supported by the NSF and by IARPA via the ARO. C. R. acknowledges support from the Caltech PMA division - Millikan. S. P. acknowledges the support of the Center for the Physics of Information.
Funding AgencyGrant Number
Intelligence Advanced Research Projects Activity via Army Research Office (IARPA ARO)UNSPECIFIED
Caltech PMA division-MillikanUNSPECIFIED
Center for the Physics of InformationUNSPECIFIED
Issue or Number:20
Classification Code:PACS numbers: 85.85.+j, 37.10.Jk, 42.50.-p
Record Number:CaltechAUTHORS:20091208-111445504
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Official Citation:Cavity Optomechanics with Stoichiometric SiN Films D. J. Wilson, C. A. Regal, S. B. Papp, and H. J. Kimble, Phys. Rev. Lett. 103, 207204 (2009), DOI:10.1103/PhysRevLett.103.207204
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:16902
Deposited By: Jason Perez
Deposited On:08 Dec 2009 21:34
Last Modified:03 Oct 2019 01:19

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