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Fabrication and Microstructure Control of Nanoscale Mechanical Testing Specimens via Electron Beam Lithography and Electroplating

Burek, Michael J. and Greer, Julia R. (2010) Fabrication and Microstructure Control of Nanoscale Mechanical Testing Specimens via Electron Beam Lithography and Electroplating. Nano Letters, 10 (1). pp. 69-76. ISSN 1530-6984. http://resolver.caltech.edu/CaltechAUTHORS:20100129-133838310

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Abstract

It has been demonstrated that the mechanical properties of materials change significantly when external dimensions are confined to the nanoscale. Currently, the dominant fabrication method for mechanical testing specimens with nanometer dimensions is by using focused ion beam (FIB) milling, which results in inevitable Ga+ induced damage to the microstructure. Here, we report a FIB-less fabrication technique to create arrays of vertically oriented gold and copper nanopillars based on patterning polymethylmethacrylate by electron beam lithography and subsequent electroplating into the prescribed template. This fabrication process is capable of producing a wide range of microstructures: from single crystals and nanotwinned, to bi-, poly-, and nanocrystalline mechanical testing specimens with diameters from 750 down to 25 nm with the diameter range below 100 nm previously inaccessible by FIB.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1021/nl902872w DOIArticle
http://pubs.acs.org/doi/full/10.1021/nl902872wPublisherArticle
ORCID:
AuthorORCID
Greer, Julia R.0000-0002-9675-1508
Additional Information:© 2009 American Chemical Society. Received for review: 09/1/2009. Publication Date (Web): December 4, 2009. This research is supported by National Science Foundation CAREER GRANT DMR-0748267. The authors thank Dongchan Jang and Andrew Jennings for their help with TEM operation and analysis. The authors gratefully acknowledge critical support and infrastructure provided for this work by the Kavli Nanoscience Institute at Caltech.
Group:Kavli Nanoscience Institute
Funders:
Funding AgencyGrant Number
NSFDMR-0748267
Subject Keywords:Nano-fabrication; nano-mechanics; microstructure; e-beam lithography; electroplating
Issue or Number:1
Record Number:CaltechAUTHORS:20100129-133838310
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20100129-133838310
Official Citation:Fabrication and Microstructure Control of Nanoscale Mechanical Testing Specimens via Electron Beam Lithography and Electroplating Michael J. Burek, Julia R. Greer Nano Letters 2010 10 (1), 69-76
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:17354
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:01 Feb 2010 03:11
Last Modified:11 Sep 2015 01:45

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