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In-plane nanoelectromechanical resonators based on silicon nanowire piezoresistive detection

Mile, E. and Jourdan, G. and Bargatin, I. and Labarthe, S. and Marcoux, C. and Andreucci, P. and Hentz, S. and Kharrat, C. and Colinet, E. and Duraffourg, L. (2010) In-plane nanoelectromechanical resonators based on silicon nanowire piezoresistive detection. Nanotechnology, 21 (16). Art. No. 165504. ISSN 0957-4484. http://resolver.caltech.edu/CaltechAUTHORS:20100513-095549319

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Abstract

We report an actuation/detection scheme with a top-down nanoelectromechanical system (NEMS) for frequency shift based sensing applications with outstanding performance. It relies on electrostatic actuation and piezoresistive nanowire gauges for in-plane motion transduction. The process fabrication is fully CMOS (complementary metal–oxide–semiconductor) compatible. The results show a very large dynamic range of more than 100 dB and an unprecedented signal to background ratio of 69 dB providing an improvement of two orders of magnitude in the detection efficiency presented in the state of the art in NEMS fields. Such a dynamic range results from both negligible 1/f noise and very low Johnson noise compared to the thermomechanical noise. This simple low power detection scheme paves the way for new class of robust mass resonant sensors.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1088/0957-4484/21/16/165504 DOIUNSPECIFIED
http://iopscience.iop.org/0957-4484/21/16/165504/PublisherUNSPECIFIED
Additional Information:© 2010 IOP Publishing Ltd. Received 8 January 2010, in final form 5 March 2010. Published 30 March 2010.
Classification Code:PACS: 85.85.+j; 85.50.-n; 43.38.Fx; 07.07.Tw; 85.40.-e.
Record Number:CaltechAUTHORS:20100513-095549319
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20100513-095549319
Official Citation:E Mile et al 2010 Nanotechnology 21 165504 doi: 10.1088/0957-4484/21/16/165504
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:18286
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:24 May 2010 20:50
Last Modified:26 Dec 2012 12:02

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