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Compact silicon photonic waveguide modulator based on the vanadium dioxide metal-insulator phase transition

Briggs, Ryan M. and Pryce, Imogen M. and Atwater, Harry A. (2010) Compact silicon photonic waveguide modulator based on the vanadium dioxide metal-insulator phase transition. Optics Express, 18 (11). pp. 11192-11201. ISSN 1094-4087. doi:10.1364/OE.18.011192.

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We have integrated lithographically patterned VO2 thin films grown by pulsed laser deposition with silicon-on-insulator photonic waveguides to demonstrate a compact in-line absorption modulator for use in photonic circuits. Using single-mode waveguides at λ = 1550 nm, we show optical modulation of the guided transverse-electric mode of more than 6.5 dB with 2 dB insertion loss over a 2-µm active device length. Loss is determined for devices fabricated on waveguide ring resonators by measuring the resonator spectral response, and a sharp decrease in resonator quality factor is observed above 70 °C, consistent with switching of VO_2 to its metallic phase. A computational study of device geometry is also presented, and we show that it is possible to more than double the modulation depth with modified device structures.

Item Type:Article
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URLURL TypeDescription
Atwater, Harry A.0000-0001-9435-0201
Additional Information:© 2010 Optical Society of America. Received 23 Mar 2010; revised 29 Apr 2010; accepted 4 May 2010; published 12 May. The authors thank J.P.B. Müller for assistance with waveguide optimization and G.M. Kimball for valuable input on electrical measurements. This work was supported under AFOSR grant FA9550-06-1-0480. We gratefully acknowledge critical support and infrastructure provided by the Kavli Nanoscience Institute at Caltech. Portions of this work were also performed in facilities sponsored by the Center for Science and Engineering of Materials, an NSF MRSEC. R.M.B. acknowledges support from the National Defense Science and Engineering Graduate Fellowship, and I.M.P. acknowledges the support of the NSF Graduate Fellowship.
Group:Kavli Nanoscience Institute
Funding AgencyGrant Number
Air Force Office of Scientific Research (AFOSR)FA9550-06-1-0480
Kavli Nanoscience InstituteUNSPECIFIED
National Defense Science and Engineering Graduate (NDSEG) FellowshipUNSPECIFIED
NSF Graduate Research FellowshipUNSPECIFIED
Issue or Number:11
Classification Code:OCIS codes: (130.3120) Integrated optics devices; (130.4110) Modulators; (160.6840) Thermo-optical materials; (230.5750) Resonators; (230.7380) Waveguides, channeled
Record Number:CaltechAUTHORS:20100630-090548466
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Official Citation:Ryan M. Briggs, Imogen M. Pryce, and Harry A. Atwater, "Compact silicon photonic waveguide modulator based on the vanadium dioxide metal-insulator phase transition," Opt. Express 18, 11192-11201 (2010)
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:18868
Deposited By: Tony Diaz
Deposited On:15 Jul 2010 21:44
Last Modified:08 Nov 2021 23:47

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