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A New Microtensile Tester for the Study of MEMS Materials with the Aid of Atomic Force Microscopy

Chasiotis, Ioannis and Knauss, Wolfgang G. (2002) A New Microtensile Tester for the Study of MEMS Materials with the Aid of Atomic Force Microscopy. Experimental Mechanics, 42 (1). pp. 51-57. ISSN 0014-4851. doi:10.1007/BF02411051.

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An apparatus has been designed and implemented to measure the elastic tensile properties (Young's modulus and tensile strength) of surface micromachined polysilicon specimens. The tensile specimens are "dog-bone" shaped ending in a large "paddle" for convenient electrostatic or, in the improved apparatus, ultraviolet (UV) light curable adhesive gripping deposited with electrostatically controlled manipulation. The typical test section of the specimens is 400 µm long with 2 µm x 50 µm cross section. The new device supports a nanomechanics method developed in our laboratory to acquire surface topologies of deforming specimens by means of Atomic Force Microscopy (AFM) to determine (fields of) strains via Digital Image Correlation (DIC). With this tool, high strength or non-linearly behaving materials can be tested under different environmental conditions by measuring the strains directly on the surface of the film with nanometer resolution.

Item Type:Article
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URLURL TypeDescription ReadCube access
Chasiotis, Ioannis0000-0001-6521-8332
Additional Information:© Society for Experimental Mechanics, Inc. 2002. Original manuscript submitted: July 20, 2000. Final manuscript received: October 18, 2001. The authors gratefully acknowledge support by the Airforce Office of Scientific Research through grant F49629-97-1-0324 (Round Robin Program), and under grant F49620- 99-1-0091, with Major Brian Sanders, Drs. O. Ochoa, D. Segalman and T. Hahn as the monitors.
Funding AgencyGrant Number
Air Force Office of Scientific Research (AFOSR)F49629-97-1-0324
Air Force Office of Scientific Research (AFOSR)F49620- 99-1-0091
Subject Keywords:Mechanical properties, microtensile testing, AFM, digital image correlation, MEMS
Issue or Number:1
Record Number:CaltechAUTHORS:CHAem02
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Official Citation:Chasiotis, I. & Knauss, W.G. Experimental Mechanics (2002) 42: 51.
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:19
Deposited By: Wolfgang Gustav Knauss
Deposited On:30 Nov 2004
Last Modified:08 Nov 2021 18:58

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