CaltechAUTHORS
  A Caltech Library Service

A New Microtensile Tester for the Study of MEMS Materials with the Aid of Atomic Force Microscopy

Chasiotis, Ioannis and Knauss, Wolfgang G. (2002) A New Microtensile Tester for the Study of MEMS Materials with the Aid of Atomic Force Microscopy. Experimental Mechanics, 42 (1). pp. 51-57. ISSN 0014-4851. http://resolver.caltech.edu/CaltechAUTHORS:CHAem02

[img]
Preview
PDF
See Usage Policy.

339Kb

Use this Persistent URL to link to this item: http://resolver.caltech.edu/CaltechAUTHORS:CHAem02

Abstract

An apparatus has been designed and implemented to measure the elastic tensile properties (Young's modulus and tensile strength) of surface micromachined polysilicon specimens. The tensile specimens are "dog-bone" shaped ending in a large "paddle" for convenient electrostatic or, in the improved apparatus, ultraviolet (UV) light curable adhesive gripping deposited with electrostatically controlled manipulation. The typical test section of the specimens is 400 µm long with 2 µm x 50 µm cross section. The new device supports a nanomechanics method developed in our laboratory to acquire surface topologies of deforming specimens by means of Atomic Force Microscopy (AFM) to determine (fields of) strains via Digital Image Correlation (DIC). With this tool, high strength or non-linearly behaving materials can be tested under different environmental conditions by measuring the strains directly on the surface of the film with nanometer resolution.


Item Type:Article
Additional Information:Original manuscript submitted: July 20, 2000. Final manuscript received: October 18, 2001.
Group:GALCIT
Issue or Number:1
Record Number:CaltechAUTHORS:CHAem02
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:CHAem02
Alternative URL:http://exm.sagepub.com/cgi/reprint/42/1/51
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:19
Collection:CaltechAUTHORS
Deposited By: Wolfgang Gustav Knauss
Deposited On:30 Nov 2004
Last Modified:14 Sep 2016 00:05

Repository Staff Only: item control page