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Cracking pressure control of parylene checkvalve using slanted tensile tethers

Lin, Jeffrey Chun-Hui and Yu, Feiqiao and Tai, Yu-Chong (2010) Cracking pressure control of parylene checkvalve using slanted tensile tethers. In: MEMS 2010: 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. Proceedings: IEEE Micro Electro Mechanical Systems. IEEE , pp. 1107-1110. ISBN 978-1-4244-5764-9. https://resolver.caltech.edu/CaltechAUTHORS:20100713-143812992

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Abstract

MEMS check valves with fixed cracking pressures are important in micro-fluidic applications where the pressure, flow directions and flow rates all need to be carefully controlled. This work presents a new surface-micromachined parylene check valve that uses residual thermal stress in the parylene to control its cracking pressure. The new check valve uses slanted tethers to allow the parylene tensile stress to apply a net downward force on the valving seat against the orifice. The angle of the slanted tethers is made using a gray-scale mask to create a sloped sacrificial photoresist with the following tether parylene deposition. The resulted check valves have both the cracking pressures and flow profiles agreeable well with our theoretical analysis.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1109/MEMSYS.2010.5442404 DOIUNSPECIFIED
http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=5438531PublisherUNSPECIFIED
ORCID:
AuthorORCID
Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 2010 IEEE. The authors would like to thank Mr. Trevor Roper for his valuable fabrication assistance.
Subject Keywords:cracking pressure control , gray-scale mask , microfluidic applications , micromechanical device check valves , orifice , parylene check valve , parylene tensile stress , residual thermal stress , slanted tensile tethers , sloped sacrificial photoresist , surface-micromachined check valve , tether parylene deposition
Other Numbering System:
Other Numbering System NameOther Numbering System ID
INSPEC Accession Number11241177
Series Name:Proceedings: IEEE Micro Electro Mechanical Systems
Record Number:CaltechAUTHORS:20100713-143812992
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20100713-143812992
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:19036
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:14 Jul 2010 16:04
Last Modified:03 Oct 2019 01:51

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