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Parylene stiction

Yu, Feiqiao and Lin, Jeffrey Chun-Hui and Chen, Po-Jui and Tai, Yu-Chong (2010) Parylene stiction. In: IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS). IEEE , pp. 408-411. ISBN 978-1-4244-5761-8 . http://resolver.caltech.edu/CaltechAUTHORS:20100715-120349601

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Abstract

This paper presents a preliminary study into stiction between parylene C and substrate surfaces for biocompatible check-valve applications. During fabrication, parylene C is used as the structural material for the check-valve. The substrate surfaces studied include Au, Al, Si, parylene C, XeF_2 treated Si, and silicon dioxide. Stiction between different surfaces is created after sacrificial photoresist etching. Then, the stiction is measured using blister tests, and stiction mechanisms for different materials are investigated. The devices are released with different recipes to examine their effects. Finally, the results of the study reveal methods to control the cracking pressure of parylene check-valves.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1109/MEMSYS.2010.5442478DOIUNSPECIFIED
http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5442478PublisherUNSPECIFIED
ORCID:
AuthorORCID
Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 2010 IEEE. Issue Date: 24-28 Jan. 2010; Date of Current Version: 08 April 2010.
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INSPEC Accession Number11241195
Record Number:CaltechAUTHORS:20100715-120349601
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20100715-120349601
Official Citation:Feiqiao Yu; Lin, J.C.-H.; Po-Jui Chen; Yu-Chong Tai; , "Parylene stiction," Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on , vol., no., pp.408-411, 24-28 Jan. 2010 doi: 10.1109/MEMSYS.2010.5442478 URL: http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=5442478&isnumber=5442276
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:19080
Collection:CaltechAUTHORS
Deposited By: Jason Perez
Deposited On:04 Aug 2010 18:46
Last Modified:16 May 2017 22:57

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