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Floating-disk parylene microvalve for self-regulating biomedical flow controls

Chen, Po-Jui and Rodger, Damien C. and Humayun, Mark S. and Tai, Yu-Chong (2008) Floating-disk parylene microvalve for self-regulating biomedical flow controls. In: MEMS 2008 Tucson : 21st IEEE International Conference on Micro Electro Mechanical Systems. IEEE , Piscataway, NJ, pp. 575-578. ISBN 978-1-4244-1792-6.

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A novel self-regulating parylene micro valve is presented in this paper with potential applications for biomedical flow controls. Featuring a free-floating bendable valve disk and two-level valve seat, this surface-micromachined polymeric valve accomplishes miniature pressure/flow rate regulation in a band-pass profile stand-alone without the need of power sources or active actuation. Experimental data of underwater testing results have successfully demonstrated that the microfabricated in-channel valve can regulate water flow at 0-80 mmHg and 0-10 µL/min pressure/flow rate level, which is perfectly suitable for biomedical and lab-on-a-chip applications. For example, such biocompatible microvalve can be incorporated in ocular implants for control of eye fluid drainage to fulfill intraocular pressure (IOP) regulation in glaucoma patients.

Item Type:Book Section
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URLURL TypeDescription DOIArticle
Rodger, Damien C.0000-0002-1583-5946
Humayun, Mark S.0000-0002-5830-5208
Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 2008 IEEE. This work was supported in part by the Engineering Research Centers Program of the National Science Foundation under NSF Award Number EEC-0310723. The authors would also like to thank Mr. Trevor Roper for his fabrication assistance.
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Record Number:CaltechAUTHORS:20100813-083041941
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:19421
Deposited By: Tony Diaz
Deposited On:13 Aug 2010 16:35
Last Modified:08 Nov 2021 23:52

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