Chen, Po-Jui and Rodger, Damien C. and Humayun, Mark S. and Tai, Yu-Chong (2008) Floating-disk parylene microvalve for self-regulating biomedical flow controls. In: MEMS 2008 Tucson : 21st IEEE International Conference on Micro Electro Mechanical Systems. IEEE , Piscataway, NJ, pp. 575-578. ISBN 978-1-4244-1792-6. https://resolver.caltech.edu/CaltechAUTHORS:20100813-083041941
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Abstract
A novel self-regulating parylene micro valve is presented in this paper with potential applications for biomedical flow controls. Featuring a free-floating bendable valve disk and two-level valve seat, this surface-micromachined polymeric valve accomplishes miniature pressure/flow rate regulation in a band-pass profile stand-alone without the need of power sources or active actuation. Experimental data of underwater testing results have successfully demonstrated that the microfabricated in-channel valve can regulate water flow at 0-80 mmHg and 0-10 µL/min pressure/flow rate level, which is perfectly suitable for biomedical and lab-on-a-chip applications. For example, such biocompatible microvalve can be incorporated in ocular implants for control of eye fluid drainage to fulfill intraocular pressure (IOP) regulation in glaucoma patients.
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| Additional Information: | © 2008 IEEE. This work was supported in part by the Engineering Research Centers Program of the National Science Foundation under NSF Award Number EEC-0310723. The authors would also like to thank Mr. Trevor Roper for his fabrication assistance. | |||||||||
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| DOI: | 10.1109/MEMSYS.2008.4443721 | |||||||||
| Record Number: | CaltechAUTHORS:20100813-083041941 | |||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20100813-083041941 | |||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | |||||||||
| ID Code: | 19421 | |||||||||
| Collection: | CaltechAUTHORS | |||||||||
| Deposited By: | Tony Diaz | |||||||||
| Deposited On: | 13 Aug 2010 16:35 | |||||||||
| Last Modified: | 08 Nov 2021 23:52 |
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