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A Micromechanical Parylene Spiral-Tube Sensor and Its Applications of Unpowered Environmental Pressure/Temperature Sensing

Chen, Po-Jui and Tai, Yu-Chong (2007) A Micromechanical Parylene Spiral-Tube Sensor and Its Applications of Unpowered Environmental Pressure/Temperature Sensing. In: 2007 IEEE Sensors. IEEE , pp. 1476-1479. ISBN 978-1-4244-1261-7. https://resolver.caltech.edu/CaltechAUTHORS:20100820-112903879

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Abstract

A multi-function micromechanical pressure/temperature sensor incorporating a microfabricated parylene spiral tube is presented. Its visible responses in expression of in situ rotational tube deformation enable unpowered sensing directly from optical device observation without electrical or any powered signal transduction. Sensor characterizations show promising pressure (14.46°/kPa sensitivity, 0.11 kPa resolution) and temperature (6.28°/°C sensitivity, 0.24 °C resolution) responses. Depending on different application requests, this sensor can be individually utilized to measure pressure/temperature of systems having one property varying while the other stabilized, such as intraocular or other in vivo pressure sensing of certain apparatus inside human bodies or other biological targets. A straightforward sensor-pair configuration has also been implemented to retrieve the decoupled pressure and temperature readouts, hence ultimately realizes a convenient environmental pressure and temperature sensing in various systems.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1109/ICSENS.2007.4388693 DOIArticle
http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=4388693PublisherArticle
ORCID:
AuthorORCID
Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 2007 IEEE. This work was supported in part by the Engineering Research Centers Program of the National Science Foundation (Award Number EEC-0310723). The authors especially thank Mr. Trevor Roper for his fabrication assistance.
Funders:
Funding AgencyGrant Number
NSFEEC-0310723
DOI:10.1109/ICSENS.2007.4388693
Record Number:CaltechAUTHORS:20100820-112903879
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20100820-112903879
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:19557
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:20 Aug 2010 18:43
Last Modified:08 Nov 2021 23:53

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