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Stability of cerium oxide on silicon studied by x-ray photoelectron spectroscopy

Preisler, E. J. and Marsh, O. J. and Beach, R. A. and McGill, T. C. (2001) Stability of cerium oxide on silicon studied by x-ray photoelectron spectroscopy. Journal of Vacuum Science and Technology B, 19 (4). pp. 1611-1618. ISSN 1071-1023. doi:10.1116/1.1387464.

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The silicon-cerium oxide interface is studied using x-ray photoelectron spectroscopy. The oxidation and reduction of species at the interface are examined as a function of annealing temperature both in vacuum and oxygen ambient, in order to determine their relative stabilities. By depositing a very thin CeO2 film (similar to 30 Angstrom), the cerium and silicon core level peaks can be monitored simultaneously. The presence of characteristic chemical shifts of the Si 2p peak gives information about any SiOx, layer that may form at the interface. The oxidation state of the cerium can be probed from three different areas of the spectrum. From this information we can infer the oxidation state of both the silicon and the cerium. For the first time a complete picture of the interface is obtained. The implications of these findings on the utility of CeO2 in device applications are discussed.

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Additional Information:©2001 American Vacuum Society. Received 9 January 2001; accepted 5 June 2001. The authors wish to acknowledge helpful technical discussions with R. Grant about the intricacies of XPS and with J. O. McCaldin about the thermodynamics. The authors acknowledge the patient support of the Defense Advanced Research Projects Agency as monitored by the Air Force Office of Scientific Research under Gerald Witt under Contact No. F49620-96-1-0021.
Subject Keywords:X-ray photoelectron spectra; semiconductor-insulator boundaries; core levels; chemical shift; thermal stability; silicon; elemental semiconductors; cerium compounds; oxidation; reduction (chemical); annealing
Issue or Number:4
Record Number:CaltechAUTHORS:PREjvstb01
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:2020
Deposited By: Tony Diaz
Deposited On:02 Mar 2006
Last Modified:08 Nov 2021 19:44

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