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Nanoelectromechanical systems: Potential, progress, & projections

Roukes, M. L. (2007) Nanoelectromechanical systems: Potential, progress, & projections. In: Proceedings IEEE: The Twentieth Annual International Conference on Micro Electro Mechanical Systems. Proceedings IEEE Micro Electro Mechanical Systems. IEEE , Piscataway, NJ, pp. 93-94. ISBN 978-1-4244-0950-1.

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Nanoelectromechanical systems (NEMS) represent the next regime of size reduction beyond the microscale for mechanical devices. In their tiniest, ultimate realization, NEMS will be formed with sub-nanometer scale precision from atomic- and molecular-scale mechanical elements as first envisaged by Feynman (1). Although nanowire and nanotube based NEMS today verge on this domain, their assembly into functional devices remains more of an art than a science, as they are typically fabricated one-by-one by complicated means with low yield. By contrast, the most robust forms of NEMS are currently patterned by top-down methods; in fact their production is now being scaled to enable large-scale integration over 200 mm wafers with minimum feature sizes that are below 50 nm. In this paper I will describe how nanoscale mechanical elements provide benefits beyond the obvious, that is, benefits in addition to the possibility of increased device density. The reduced size of NEMS enables mechanical functionality that completely transcends what is possible at the microscale with MEMS (2). However, size reduction to the nanoscale may not be a panacea for all applications - for some applications larger may still be better!

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Roukes, M. L.0000-0002-2916-6026
Additional Information:© 2007 IEEE. Issue Date: 21-25 Jan. 2007; Date of Current Version: 21 January 2008.
Series Name:Proceedings IEEE Micro Electro Mechanical Systems
Record Number:CaltechAUTHORS:20101007-120001450
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Official Citation:Roukes, M.L.; , "Nanoelectromechanical systems: Potential, progress, & projections," Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on , vol., no., pp.93-94, 21-25 Jan. 2007 doi: 10.1109/MEMSYS.2007.4433022 URL:
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:20338
Deposited By: Jason Perez
Deposited On:14 Oct 2010 16:41
Last Modified:08 Nov 2021 23:59

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