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Stiction, adhesion energy, and the Casimir effect in micromechanical systems

Buks, E. and Roukes, M. L. (2001) Stiction, adhesion energy, and the Casimir effect in micromechanical systems. Physical Review B, 63 (3). Art. No. 033402. ISSN 0163-1829. doi:10.1103/PhysRevB.63.033402.

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We measure the adhesion energy of gold using a micromachined cantilever beam. Stress and stiffness of the beam are characterized by measuring the spectrum of mechanical vibrations and the deflection due to external force. We induce stiction between the beam and a nearby surface, employing capillary forces to determine the adhesion energy γ. The obtained value γ=0.06 J/m^2 is a factor of 6 smaller than that predicted by idealized theory. This discrepancy may arise from surface roughness or an adsorbed layer intervening between the contacting surfaces in these mesoscopic structures.

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Roukes, M. L.0000-0002-2916-6026
Additional Information:© 2001 The American Physical Society Received 3 August 2000; revised 5 October 2000; published 2 January 2001 The authors are grateful to K. Schwab for his assistance in sample fabrication and Y. Buks for image processing of the SEM micrographs. This research was supported by the Rothschild Foundation, the R. A. Millikan Foundation at Caltech, and DARPA MTO/MEMS under Grant No. DABT63-98-1-0012.
Funding AgencyGrant Number
Rothschild FoundationUNSPECIFIED
Caltech Millikan FellowshipUNSPECIFIED
Defense Advanced Research Projects Agency (DARPA)DABT63-98-1-0012
Issue or Number:3
Record Number:CaltechAUTHORS:BUKprb01
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ID Code:2074
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Deposited On:06 Mar 2006
Last Modified:08 Nov 2021 19:44

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