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Implantable Unpowered Parylene MEMS Intraocular Pressure Sensor

Chen, Po-Jui and Rodger, Damien C. and Meng, Ellis and Humayun, Mark S. and Tai, Yu-Chong (2006) Implantable Unpowered Parylene MEMS Intraocular Pressure Sensor. In: 2006 International Conference on Microtechnologies in Medicine and Biology. IEEE , Piscataway, NJ, pp. 256-259. ISBN 978-1-4244-0337-0.

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This paper presents the first implantable, unpowered, parylene-based micro-electro-mechanical-systems (MEMS) pressure sensor for intraocular pressure (IOP) sensing. From in situ mechanical deformation of the compliant structures, this sensor registers pressure variations without power consumption/transduction. Micromachined high-aspect-ratio thin-walled tubes in different geometric layouts are exploited to obtain a high-sensitivity pressure response. An integrated packaging method has been successfully developed to realize suture-less implantation of the device. In vitro testing results have demonstrated that the IOP sensor can achieve 0.67 degree/mmHg angular sensitivity with a spiral-tube design, 3.43 µm/mmHg lateral sensitivity with a long-armed-tube design, and 0.38 µm/mmHg longitudinal sensitivity with a serpentine-tube design. This IOP sensor is designed to be implanted in the anterior chamber of the eye and anchored directly on the iris so that, under incident visible light, the pressure response of the implant can be directly observed from outside the eye, which enables faithful and unpowered IOP monitoring in glaucoma patients

Item Type:Book Section
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URLURL TypeDescription
Rodger, Damien C.0000-0002-1583-5946
Humayun, Mark S.0000-0002-5830-5208
Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 2007 IEEE. Issue Date: 9-12 May 2006; Date of Current Version: 30 July 2007. This work was supported in part by the Engineering Research Centers Program of the National Science Foundation under NSF Award Number EEC-0310723. The authors especially thank Mr. Trevor Roper for his fabrication assistance.
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Subject Keywords:Implantable, Intraocular Pressure, Parylene, Pressure Sensor, Unpowered
Record Number:CaltechAUTHORS:20101112-151218275
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Official Citation:Chen, P.-J.; Rodger, D.C.; Meng, E.; Humayun, M.S.; Tai, Y.-C.; , "Implantable Unpowered Parylene MEMS Intraocular Pressure Sensor," Microtechnologies in Medicine and Biology, 2006 International Conference on , vol., no., pp.256-259, 9-12 May 2006 doi: 10.1109/MMB.2006.251543 URL:
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:20785
Deposited By: Jason Perez
Deposited On:16 Nov 2010 23:40
Last Modified:09 Mar 2020 13:19

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