Schilling, J. and Scherer, A. and Gösele, U. and Kolbe, M. (2004) Macroporous silicon membranes as electron and x-ray transmissive windows. Applied Physics Letters, 85 (7). pp. 1152-1154. ISSN 0003-6951. doi:10.1063/1.1772519. https://resolver.caltech.edu/CaltechAUTHORS:SCHapl04
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Abstract
Macroporous silicon membranes are fabricated whose pores are terminated with 60 nm thin silicon dioxide shells. The transmission of electrons with energies of 5 kV-25 kV through these membranes was investigated reaching a maximum of 22% for 25 kV. Furthermore, the transmission of electromagnetic radiation ranging from the far-infrared to the x-ray region was determined. The results suggest the application of the membrane as window material for electron optics and energy dispersive x-ray detectors.
| Item Type: | Article | ||||||
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| Additional Information: | Copyright © 2004 American Institute of Physics. Received 9 February 2004; accepted 21 May 2004. | ||||||
| Subject Keywords: | silicon; elemental semiconductors; membranes; porous semiconductors; electromagnetic wave transmission; electron optics; electron microscopes; X-ray detection | ||||||
| Issue or Number: | 7 | ||||||
| DOI: | 10.1063/1.1772519 | ||||||
| Record Number: | CaltechAUTHORS:SCHapl04 | ||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:SCHapl04 | ||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||
| ID Code: | 2104 | ||||||
| Collection: | CaltechAUTHORS | ||||||
| Deposited By: | Tony Diaz | ||||||
| Deposited On: | 08 Mar 2006 | ||||||
| Last Modified: | 08 Nov 2021 19:45 |
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