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Wafer-Scale Nanopatterning and Translation into High-Performance Piezoelectric Nanowires

Nguyen, Thanh D. and Nagarah, John M. and Qi, Yi and Nonnenmann, Stephen S. and Morozov, Anatoli V. and Li, Simonne and Arnold, Craig B. and McAlpine, Michael C. (2010) Wafer-Scale Nanopatterning and Translation into High-Performance Piezoelectric Nanowires. Nano Letters, 10 (11). pp. 4595-4599. ISSN 1530-6984.

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The development of a facile method for fabricating one-dimensional, precisely positioned nanostructures over large areas offers exciting opportunities in fundamental research and innovative applications. Large-scale nanofabrication methods have been restricted in accessibility due to their complexity and cost. Likewise, bottom-up synthesis of nanowires has been limited in methods to assemble these structures at precisely defined locations. Nanomaterials such as PbZr_xTi_(1−x)O_3 (PZT) nanowires (NWs)—which may be useful for nonvolatile memory storage (FeRAM), nanoactuation, and nanoscale power generation—are difficult to synthesize without suffering from polycrystallinity or poor stoichiometric control. Here, we report a novel fabrication method which requires only low-resolution photolithography and electrochemical etching to generate ultrasmooth NWs over wafer scales. These nanostructures are subsequently used as patterning templates to generate PZT nanowires with the highest reported piezoelectric performance (d_(eff) ~ 145 pm/V). The combined large-scale nanopatterning with hierarchical assembly of functional nanomaterials could yield breakthroughs in areas ranging from nanodevice arrays to nanodevice powering.

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Additional Information:© 2010 American Chemical Society. Received for review: 07/26/2010. Published on Web: 10/12/2010. We acknowledge the use of the PRISM Imaging and Analysis Center, which is supported by the NSF MRSEC Program via the Princeton Center for Complex Materials (No. DMR-0819860). J.M.N. acknowledges support from The Broad Foundations. M.C.M. acknowledges support of this work by the Young Investigator Award from the Intelligence Community (No. 2008-1218103-000), the Defense Advanced Research Projects Agency (No. N66001-10- 1-2012), and the National Science Foundation (No. NSF CMMI-1036055).
Funding AgencyGrant Number
NSF Materials Research Science and Engineering Centers (MRSEC)/Princeton Center for Complex MaterialsDMR-0819860
Broad FoundationsUNSPECIFIED
Intelligence Community2008-1218103-000
Defense Advanced Research Projects Agency (DARPA)N66001-10-1-2012
Subject Keywords:Nanomanufacturing; energy conversion; piezoelectric nanowires; laser annealing
Issue or Number:11
Record Number:CaltechAUTHORS:20101206-113449805
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Official Citation:Wafer-Scale Nanopatterning and Translation into High-Performance Piezoelectric Nanowires Thanh D. Nguyen, John M. Nagarah, Yi Qi, Stephen S. Nonnenmann, Anatoli V. Morozov, Simonne Li, Craig B. Arnold, Michael C. McAlpine Nano Letters 2010 10 (11), 4595-4599
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:21187
Deposited By: Tony Diaz
Deposited On:08 Dec 2010 18:30
Last Modified:03 Oct 2019 02:20

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