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A 32*32 parylene-pyrolyzed carbon bolometer imager

Liger, Matthieu and Tai, Yu-Chong (2006) A 32*32 parylene-pyrolyzed carbon bolometer imager. In: MEMS 2006 Istanbul 19th IEEE International Conference on Micro Electro Mechanical Systems. Proceedings: IEEE Micro Electro Mechanical System Workshop. IEEE , Piscataway, N.J., pp. 106-109. ISBN 0780394755.

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Here we present a novel and simple way to fabricate uncooled infrared detectors suitable for integration into large-area arrays. The design is based on thin-film carbon obtained by means of parylene pyrolysis. We demonstrate the first micromachined carbon uncooled bolometer array made of two layers of self-supporting pyrolyzed-parylene carbon having different process-tuned properties. Measurements show that the target temperature resolution, or NETD (Noise-Equivalent Temperature Difference) to target temperature can be as low as 35mK for 100μs electrical signal integration time, respectively. This matches the current state of the art which is very promising considering the fact that this is the first time pyrolytic carbon has been used to fabricate a microbolometer array.

Item Type:Book Section
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Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 2006 IEEE. Issue Date: 2006, Date of Current Version: 08 May 2006. The authors wish to thank Stacey Walker Boland and Scott Miserendino for their help with characterizing the material as well as Hsi-wen Lo for his help in building the testing setup. Trevor Roper is also acknowledged for equipment support.
Series Name:Proceedings: IEEE Micro Electro Mechanical System Workshop
Record Number:CaltechAUTHORS:20110215-111243228
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Official Citation:M. Liger; Yu-Chong Tai; , "A 32*32 Parylene-Pyrolyzed Carbon Bolometer Imager," Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on , vol., no., pp.106-109, 2006 doi: 10.1109/MEMSYS.2006.1627747 URL:
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:22197
Deposited By: Benjamin Perez
Deposited On:15 Feb 2011 19:51
Last Modified:09 Nov 2021 16:03

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