A Caltech Library Service

Monolithic Silicon Probes with Flexible Parylene Cables for Neural Prostheses

Pang, Changlin and Cham, Jorge G. and Musallam, Sam and Tai, Yu-Chong and Burdick, Joel W. and Andersen, Richard A. (2006) Monolithic Silicon Probes with Flexible Parylene Cables for Neural Prostheses. In: 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems. IEEE , Piscataway, N.J., 1125 -1128. ISBN 1424401399.

PDF - Published Version
See Usage Policy.


Use this Persistent URL to link to this item:


This work presents the first parylene-insulated silicon probes, which are used for neural prostheses to record high-level cognitive neural signals. With parylene technology, our probes have several advantages compared with the current devices. First, instead of inorganic materials (e.g. silicon dioxide, silicon nitride), the electrodes and conduction traces on the probes are insulated by parylene, an easily-deposited polymer with mechanical flexibility and biocompatibility. As a result, the probes exhibit better electrical and mechanical properties. Second, flexible parylene cables are monolithically integrated with the probes, which arm the probes with very high flexibility to be easily assembled to a high density 3-D array and at the same time provide an ideal method to transmit neural signals through skull during chronic recording. The all dry fabrication process and a 4 X 4 probe array (64 electrodes) were demonstrated. The probes were successfully tested electrically and mechanically in rat cortex. Neural signals were properly recorded.

Item Type:Book Section
Related URLs:
URLURL TypeDescription DOIArticle
Tai, Yu-Chong0000-0001-8529-106X
Andersen, Richard A.0000-0002-7947-0472
Additional Information:© 2006 IEEE. Issue Date: 18-21 Jan. 2006, Date of Current Version: 19 March 2007. This work was supported by the National Institutes of Health and the Defense Advanced Research Projects Agency. We would like to thank Mr. Trevor Roper for assistance with fabrication and the members of the Anderson lab at Caltech for help on vivo testing.
Funding AgencyGrant Number
Defense Advanced Research Projects Agency (DARPA)UNSPECIFIED
Subject Keywords:neural probes; flexible parylene cables; neural prostheses
Record Number:CaltechAUTHORS:20110217-124110233
Persistent URL:
Official Citation:Changlin Pang; Cham, J.G.; Musallam, S.; Yu-Chong Tai; Burdick, J.W.; Andersen, R.A.; , "Monolithic Silicon Probes with Flexible Parylene Cables for Neural Prostheses," Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on , vol., no., pp.1125-1128, 18-21 Jan. 2006 doi: 10.1109/NEMS.2006.334646 URL:
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:22358
Deposited By: Benjamin Perez
Deposited On:17 Feb 2011 21:56
Last Modified:09 Nov 2021 16:04

Repository Staff Only: item control page