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Platinum Black Electroplated Impedance Particle Sensor

Zheng, Siyang and Liu, Mike and Kasdan, Harvey L. and Tai, Yu-Chong (2006) Platinum Black Electroplated Impedance Particle Sensor. In: 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems. IEEE , Piscataway, N.J., pp. 87-91. ISBN 1-4244-0139-9.

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We present a micro electrical impedance particle sensor. To solve the problem of large electrode electrolyte interface impedance, we electroplated the electrodes with platinum black. Devices are fabricated with integrated parylene technology. An electrical model for the system is proposed and analytic solutions are obtained. Impedance spectra measurement of the device filled with various media are in excellent agreement with model analysis. Signals from individual 10 µm polystyrene beads passing the sensing electrodes are successfully obtained.

Item Type:Book Section
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URLURL TypeDescription DOIArticle
Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 2006 IEEE. Issue Date: 18-21 Jan. 2006, Date of Current Version: 19 March 2007. This work is supported by NASA through National Space Biomedical Research Institute (NSBRI). The co-operative agreement number is NCC 9-58-317. The authors would like to thank other members of the Caltech Micromachining Laboratory for their valuable assistance.
Funding AgencyGrant Number
NASANCC 9-58-317
Subject Keywords:impedance; particle; platinum black; electroplating; paryleen
Record Number:CaltechAUTHORS:20110218-145813619
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Official Citation:Siyang Zheng; Liu, M.; Kasdan, H.L.; Yu-Chong Tai; , "Platinum Black Electroplated Impedance Particle Sensor," Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on , vol., no., pp.87-91, 18-21 Jan. 2006 doi: 10.1109/NEMS.2006.334628 URL:
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:22389
Deposited By: Benjamin Perez
Deposited On:18 Feb 2011 23:50
Last Modified:03 Oct 2019 02:37

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