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Spiral-Tube Parylene Intraocular Pressure Sensor

Chen, Po-Jui and Rodger, Damien and Humayun, Mark S. and Tai, Yu-Chong (2005) Spiral-Tube Parylene Intraocular Pressure Sensor. In: MEMS 2005 Miami : 18th IEEE International Conference on Micro Electro Mechanical Systems. IEEE Micro Electromechanical Systems Workshop. IEEE , Piscataway, NJ, pp. 311-314. ISBN 0-7803-8732-5.

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This paper presents the first biocompatible, all-mechanical, micromachined pressure sensor with a high-aspect-ratio spiral-tube structure fabricated through a one-layer parylene process. This passive sensor has zero power consumption and indicates the pressure variation by changes of in situ in-plane spiral rotation, which can be gauged externally by a direct and convenient optical observation. A 1 mm-radius device with a 10-turn spiral has demonstrated a 0.22 degree/mmHg sensitivity in liquid. This device is designed for eye implantation and the intraocular spiral rotation can be recorded from outside of the eye. Such a sensing technology is proposed to monitor the intraocular pressure in glaucoma patients.

Item Type:Book Section
Related URLs:
URLURL TypeDescription DOIArticle
Rodger, Damien0000-0002-1583-5946
Humayun, Mark S.0000-0002-5830-5208
Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 2005 IEEE. Date of Current Version: 05 July 2005. This work was supported in part by the Engineering Research Centers Program of the National Science Foundation under NSF Award Number EEC-0310723 and by a Fellowship from the Whitaker Foundation. The authors would also like to thank Mr. Chi-Yuan Shih and Dr. Ellis Meng for valuable discussions, and other Caltech Micromachining Lab members for fabrication assistance.
Funding AgencyGrant Number
Whitaker FoundationUNSPECIFIED
Series Name:IEEE Micro Electromechanical Systems Workshop
Record Number:CaltechAUTHORS:20110609-114150828
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Official Citation:Spiral-tube parylene intraocular pressure sensor Po-Jui Chen; Rodger, D.; Yu-Chong Tai; Humayun, M.; Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on Digital Object Identifier: 10.1109/MEMSYS.2005.1453929 Publication Year: 2005 , Page(s): 311 - 314
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:23959
Deposited By: Ruth Sustaita
Deposited On:09 Jun 2011 20:22
Last Modified:09 Mar 2020 13:19

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