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Controlled Heterogeneous Nucleation and Growth of Germanium Quantum Dots on Nanopatterned Silicon Dioxide and Silicon Nitride Substrates

Chen, Kuan-Hung and Chien, Chung-Yen and Lai, Wei-Ting and George, Tom and Scherer, Axel and Li, Pei-Wen (2011) Controlled Heterogeneous Nucleation and Growth of Germanium Quantum Dots on Nanopatterned Silicon Dioxide and Silicon Nitride Substrates. Crystal Growth and Design, 11 (7). pp. 3222-3226. ISSN 1528-7483. https://resolver.caltech.edu/CaltechAUTHORS:20110803-081936746

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Abstract

Controlled heterogeneous nucleation and growth of Ge quantum dots (QDs) are demonstrated on SiO_2/Si_3N_4 substrates by means of a novel fabrication process of thermally oxidizing nanopatterned SiGe layers. The otherwise random self-assembly process for QDs is shown to be strongly influenced by the nanopatterning in determining both the location and size of the QDs. Ostwald ripening processes are observed under further annealing at the oxidation temperature. Both nanopattern oxidation and Ostwald ripening offer additional mechanisms for lithography for controlling the size and placement of the QDs.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1021/cg200470fDOIUNSPECIFIED
http://pubs.acs.org/doi/full/10.1021/cg200470fPublisherUNSPECIFIED
Additional Information:© 2011 American Chemical Society. Received: April 14, 2011 Revised: May 13, 2011. Publication Date (Web): May 31, 2011. This work was supported by the National Science Council of the Republic of China (NSC 99-2120-M-008-004 and NSC-99-2221-E-008-095-MY3).
Funders:
Funding AgencyGrant Number
National Science Council of the Republic of ChinaNSC 99-2221-E-008-095-MY3
National Science Council of the Republic of ChinaNSC 99-2120-M-008-004
Issue or Number:7
Record Number:CaltechAUTHORS:20110803-081936746
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20110803-081936746
Official Citation:Controlled Heterogeneous Nucleation and Growth of Germanium Quantum Dots on Nanopatterned Silicon Dioxide and Silicon Nitride Substrates Kuan-Hung Chen, Chung-Yen Chien, Wei-Ting Lai, Tom George, Axel Scherer, Pei-Wen Li Crystal Growth & Design 2011 11 (7), 3222-3226
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:24641
Collection:CaltechAUTHORS
Deposited By: Ruth Sustaita
Deposited On:03 Aug 2011 15:35
Last Modified:03 Oct 2019 02:58

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