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Effect of cylindrical geometry on the wet thermal oxidation of AlAs

Alonzo, A. C. and Cheng, X.-C. and McGill, T. C. (1998) Effect of cylindrical geometry on the wet thermal oxidation of AlAs. Journal of Applied Physics, 84 (12). pp. 6901-6905. ISSN 0021-8979. doi:10.1063/1.368987.

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We have investigated the wet thermal oxidation of AlAs in cylindrical geometry, a typical configuration for vertical-cavity surface-emitting lasers. Through both experiment and theoretical calculations, we demonstrate a significantly different time dependence for circular mesas from what has been reported in the literature both in studies of stripes and in a study of circular mesas. We attribute this different time dependence to the effect of geometry on the oxidation.

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Additional Information:© 1998 American Institute of Physics. (Received 22 December 1997; accepted 21 September 1998) The authors are grateful to T. F. Kuech for suggesting the possible role of cylindrical geometry. The authors also wish to thank J. O. McCauldin and E. T. Yu for useful discussions about the oxidation process. The work was supported in part by the Office of Naval Research under Grant No. N00014-89-J-1141.
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Office of Naval Research (ONR)N00014-89-J-1141
Subject Keywords:oxidation; III-V semiconductors; aluminium compounds; surface emitting lasers; semiconductor lasers
Issue or Number:12
Record Number:CaltechAUTHORS:ALOjap98
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:2479
Deposited By: Archive Administrator
Deposited On:05 Apr 2006
Last Modified:08 Nov 2021 19:48

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