Pettersson, P. O. and Ahn, C. C. and McGill, T. C. and Croke, E. T. and Hunter, A. T. (1995) Sb-surfactant-mediated growth of Si/Si1–yCy superlattices by molecular-beam epitaxy. Applied Physics Letters, 67 (17). pp. 2530-2532. ISSN 0003-6951. doi:10.1063/1.114448. https://resolver.caltech.edu/CaltechAUTHORS:PETapl95
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Abstract
Si/Si0.97C0.03 superlattices were grown on Si(001) substrates by molecular beam epitaxy (MBE) to study the use of Sb as a surfactant during Si1–yCy growth. In situ reflection high energy electron diffraction (RHEED) shows that while carbon easily disrupts the two-dimensional growth of homoepitaxial Si, such disruption is suppressed for layers grown on Sb-terminated Si(001) surfaces. Cross-sectional transmission electron microscopy (TEM) reveals that for samples grown without the use of Sb, the Si/Si0.97C0.03 interfaces (Si0.97C0.03 on Si) were much more abrupt than Si0.97C0.03/Si interfaces. In the case of Sb-mediated growth, differences in abruptness between the two types of interfaces were not readily observable.
| Item Type: | Article | ||||||
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| Additional Information: | ©1995 American Institute of Physics. (Received 22 June 1995; accepted 16 August 1995) This study was supported in part by ONR N00014-93-1-0710. We are grateful for Carol Garland’s assistance in obtaining the TEM images. | ||||||
| Subject Keywords: | ANTIMONY; INTERFACE STRUCTURE; MOLECULAR BEAM EPITAXY; MORPHOLOGY; RHEED; SILICON CARBIDES; SILICON; SUPERLATTICES; SURFACTANTS; TEM | ||||||
| Issue or Number: | 17 | ||||||
| DOI: | 10.1063/1.114448 | ||||||
| Record Number: | CaltechAUTHORS:PETapl95 | ||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:PETapl95 | ||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||
| ID Code: | 2488 | ||||||
| Collection: | CaltechAUTHORS | ||||||
| Deposited By: | Archive Administrator | ||||||
| Deposited On: | 05 Apr 2006 | ||||||
| Last Modified: | 08 Nov 2021 19:48 |
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