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Nano-Electro-Mechanical Switches Derived from Carbon-Based Nanomaterials

Kaul, A. B. and Khan, A. R. and Megerian, K. G. and Epp, L. and Bagge, L. and Jennings, A. T. and Jang, D. and Greer, J. R. (2010) Nano-Electro-Mechanical Switches Derived from Carbon-Based Nanomaterials. Nanoscience and Nanotechnology Letters, 2 (2). pp. 163-169. ISSN 1941-4900. http://resolver.caltech.edu/CaltechAUTHORS:20110816-103614921

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Abstract

We provide an overview of our work where carbon-based nanostructures have been applied to two-dimensional (2D) planar and three-dimensional (3D) vertically-oriented nano-electro-mechanical (NEM) switches. In the first configuration, laterally oriented single-walled nanotubes (SWNTs) synthesized using thermal chemical vapor deposition (CVD) were implemented for forming bridge-type 2D NEMS switches, where switching voltages were on the order of a few volts. In the second configuration, vertically oriented carbon nanofibers (CNFs) synthesized using plasma-enhanced (PE) CVD have been explored for their potential application in 3D NEMS. We have performed nanomechanical measurements on such vertically oriented tubes using nanoindentation to determine the mechanical robustness of the CNFs. Electrostatic switching was demonstrated in the CNFs synthesized on refractory metallic nitride substrates, where a nanoprobe was used as the actuating electrode inside a scanning-electron-microscope. The switching voltages were determined to be in the tens of volts range and van der Waals interactions at these length scales appeared significant, suggesting such structures are promising for nonvolatile memory applications. A finite element model was also developed to determine a theoretical pull-in voltage which was compared to experimental results.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://www.ingentaconnect.com/content/asp/nnl/2010/00000002/00000002/art00017PublisherArticle
ORCID:
AuthorORCID
Greer, J. R.0000-0002-9675-1508
Additional Information:© 2011 American Scientific Publishers. Received: 24 April 2010. Accepted: 4 June 2010. We sincerely acknowledge Robert Kowalczyk for his assistance with the PECVD growth chamber and performing chamber upgrades as necessary, in addition to Dr. Choonsup Lee, Dr. Richard L. Baron and Dr. Paul von Allmen for useful discussions. We would also like to thank Shelby Hutchens of the California Institute of Technology (Caltech) and Brian Peters of Agilent Technologies for the images taken in Figures 2(a) and (b). We gratefully acknowledge critical support and infrastructure provided for this work by the Kavli Nanoscience Institute at Caltech. This research was carried out at the Jet Propulsion Laboratory, California Institute of Technology, under a contract with the National Aeronautics and Space Administration and was funded through the internal Research and Technology Development (R&TD) program.
Group:Kavli Nanoscience Institute
Funders:
Funding AgencyGrant Number
Kavli Nanoscience InstituteUNSPECIFIED
NASA/JPL/CaltechUNSPECIFIED
Subject Keywords:Nanoelectronics; NEMS; Mechanical Resonators; SWNTs; CNFs; In Situ Characterization
Record Number:CaltechAUTHORS:20110816-103614921
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20110816-103614921
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:24883
Collection:CaltechAUTHORS
Deposited By: Jason Perez
Deposited On:16 Aug 2011 20:10
Last Modified:23 Aug 2016 10:04

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