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Balanced electronic detection of displacement in nanoelectromechanical systems

Ekinci, K. L. and Yang, Y. T. and Huang, X. M. H. and Roukes, M. L. (2002) Balanced electronic detection of displacement in nanoelectromechanical systems. Applied Physics Letters, 81 (12). pp. 2253-2255. ISSN 0003-6951. doi:10.1063/1.1507833.

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We describe a broadband radio frequency balanced bridge technique for electronic detection of displacement in nanoelectromechanical systems (NEMS). With its two-port actuation-detection configuration, this approach generates a background-nulled electromotive force in a dc magnetic field that is proportional to the displacement of the NEMS resonator. We demonstrate the effectiveness of the technique by detecting small impedance changes originating from NEMS electromechanical resonances that are accompanied by large static background impedances at very high frequencies. This technique allows the study of important experimental systems such as doped semiconductor NEMS and may provide benefits to other high frequency displacement transduction circuits.

Item Type:Article
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Roukes, M. L.0000-0002-2916-6026
Additional Information:© 2002 American Institute of Physics. (Received 8 March 2002; accepted 25 July 2002) The authors gratefully acknowledge support from DARPA MTO/MEMS under Grant No. DABT63-98-1-0012 and technical assistance from D. Harrington.
Funding AgencyGrant Number
Defense Advanced Research Projects Agency (DARPA)DABT63-98-1-0012
Subject Keywords:micromechanical resonators; microactuators; nanotechnology; microwave measurement; electric impedance measurement; displacement measurement
Issue or Number:12
Record Number:CaltechAUTHORS:EKIapl02
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:2554
Deposited By: Archive Administrator
Deposited On:10 Apr 2006
Last Modified:08 Nov 2021 19:48

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