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The Design and Implementation of a Reticle Maker for VLSI

Gray, Moshe (1981) The Design and Implementation of a Reticle Maker for VLSI. Computer Science Technical Reports, 1981.4299. California Institute of Technology , Pasadena, CA. (Unpublished)

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This paper describes the designing and building of a feedback controlled Reticle Maker for the VLSI industry. The machine is based on an innovative design of an XY photo plotter which utilizes flexures and linear motors as a means to raster scan a photographic plate. The accuracy of the machine is based on Laser Interferometery and feedback control.

Item Type:Report or Paper (Technical Report)
Related URLs:
URLURL TypeDescription ItemCaltech Masters thesis
Group:Computer Science Technical Reports
Series Name:Computer Science Technical Reports
Issue or Number:1981.4299
Record Number:CaltechCSTR:1981.4299-tr-81
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Usage Policy:You are granted permission for individual, educational, research and non-commercial reproduction, distribution, display and performance of this work in any format.
ID Code:27028
Deposited By: Imported from CaltechCSTR
Deposited On:28 Aug 2002
Last Modified:03 Oct 2019 03:20

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