Borselli, Matthew and Srinivasan, Kartik and Barclay, Paul E. and Painter, Oskar (2004) Rayleigh scattering, mode coupling, and optical loss in silicon microdisks. Applied Physics Letters, 85 (17). pp. 3693-3695. ISSN 0003-6951. doi:10.1063/1.1811378. https://resolver.caltech.edu/CaltechAUTHORS:BORapl04
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Abstract
High refractive index contrast optical microdisk resonators fabricated from silicon-on-insulator wafers are studied using an external silica fiber taper waveguide as a wafer-scale optical probe. Measurements performed in the 1500 nm wavelength band show that these silicon microdisks can support whispering-gallery modes with quality factors as high as 5.2×10^5, limited by Rayleigh scattering from fabrication induced surface roughness. Microdisks with radii as small as 2.5 µm are studied, with measured quality factors as high as 4.7×10^5 for an optical mode volume of 5.3 (lambda/n)^3.
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| Additional Information: | © 2004 American Institute of Physics (Received 22 June 2004; accepted 7 September 2004) The authors thank S. Spillane, T. Johnson, and H. Huang for helpful contributions to this work. M.B. thanks the Moore Foundation, NPSC, and HRL Laboratories, and K.S. thanks the Hertz Foundation for their graduate fellowship support. | ||||||||||
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| Subject Keywords: | silicon; elemental semiconductors; microdisc lasers; microcavity lasers; Rayleigh scattering; optical losses; surface roughness; refractive index; Q-factor | ||||||||||
| Issue or Number: | 17 | ||||||||||
| DOI: | 10.1063/1.1811378 | ||||||||||
| Record Number: | CaltechAUTHORS:BORapl04 | ||||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:BORapl04 | ||||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||||||
| ID Code: | 2704 | ||||||||||
| Collection: | CaltechAUTHORS | ||||||||||
| Deposited By: | Archive Administrator | ||||||||||
| Deposited On: | 21 Apr 2006 | ||||||||||
| Last Modified: | 08 Nov 2021 19:50 |
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