Lo, Davy Y. and Tombrello, Tom A. and Shapiro, Mark H. and Garrison, Barbara J. and Winograd, Nicholas and Harrison, Don E., Jr. (1988) Theoretical studies of ion bombardment: Many-body interactions. Journal of Vacuum Science and Technology A, 6 (3). pp. 708-711. ISSN 0734-2101. doi:10.1116/1.575159. https://resolver.caltech.edu/CaltechAUTHORS:LODjvsta88
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Abstract
Many-body forces obtained by the embedded-atom method are incorporated into the description of low-energy collisions and surface ejection processes in molecular dynamics simulations of sputtering from metal targets. Bombardment of small, single-crystal Cu targets (400–500 atoms) in three different orientations ({100}, {110}, {111}) by 5-keV Ar + ions have been simulated. The results are compared to simulations using purely pairwise additive interactions. Significant differences in the spectra of ejected atoms are found.
| Item Type: | Article | ||||||
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| Additional Information: | © 1988 American Vacuum Society (Received 18 September 1987; accepted 26 October 1987) This work was supported in part by the National Science Foundation, Grant No. DMR84-21119. | ||||||
| Subject Keywords: | ION COLLISIONS; ARGON IONS; COLLISIONS; SPUTTERING; COMPUTERIZED SIMULATION; COPPER; MANY–BODY PROBLEM | ||||||
| Issue or Number: | 3 | ||||||
| DOI: | 10.1116/1.575159 | ||||||
| Record Number: | CaltechAUTHORS:LODjvsta88 | ||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:LODjvsta88 | ||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||
| ID Code: | 2755 | ||||||
| Collection: | CaltechAUTHORS | ||||||
| Deposited By: | Archive Administrator | ||||||
| Deposited On: | 25 Apr 2006 | ||||||
| Last Modified: | 08 Nov 2021 19:50 |
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