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Nanomechanical systems: progress, challenges, and ultimate limits

Roukes, Michael (2000) Nanomechanical systems: progress, challenges, and ultimate limits. In: 58th DRC: Device Research Conference. IEEE , Piscataway, NJ, pp. 99-100. ISBN 0-7803-6472-4. https://resolver.caltech.edu/CaltechAUTHORS:20111130-084915684

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Abstract

Microelectronics technology is now pushing deep into the submicron regime, yet, for the most part, work on micromachines still remains back at the few micron scale, or larger. The time is ripe to embark upon a concerted exploration of mechanical systems at the nanoscale. This talk highlights the promise and intrigue of the nanoelectromechanical systems (NEMS) domain.


Item Type:Book Section
Related URLs:
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http://dx.doi.org/10.1109/DRC.2000.877106 DOIArticle
http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=877106PublisherArticle
ORCID:
AuthorORCID
Roukes, Michael0000-0002-2916-6026
Additional Information:© 2000 IEEE. Date of Current Version: 06 August 2002.
Record Number:CaltechAUTHORS:20111130-084915684
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20111130-084915684
Official Citation:Roukes, M.; , "Nanomechanical systems: progress, challenges, and ultimate limits ," Device Research Conference, 2000. Conference Digest. 58th DRC , vol., no., pp.99-100, 2000 doi: 10.1109/DRC.2000.877106 URL: http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=877106&isnumber=18985
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:28242
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:19 Jan 2012 19:05
Last Modified:03 Oct 2019 03:30

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