Roukes, Michael (2000) Nanomechanical systems: progress, challenges, and ultimate limits. In: 58th DRC: Device Research Conference. IEEE , Piscataway, NJ, pp. 99-100. ISBN 0-7803-6472-4. https://resolver.caltech.edu/CaltechAUTHORS:20111130-084915684
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Abstract
Microelectronics technology is now pushing deep into the submicron regime, yet, for the most part, work on micromachines still remains back at the few micron scale, or larger. The time is ripe to embark upon a concerted exploration of mechanical systems at the nanoscale. This talk highlights the promise and intrigue of the nanoelectromechanical systems (NEMS) domain.
| Item Type: | Book Section | |||||||||
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| Additional Information: | © 2000 IEEE. Date of Current Version: 06 August 2002. | |||||||||
| DOI: | 10.1109/DRC.2000.877106 | |||||||||
| Record Number: | CaltechAUTHORS:20111130-084915684 | |||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20111130-084915684 | |||||||||
| Official Citation: | Roukes, M.; , "Nanomechanical systems: progress, challenges, and ultimate limits ," Device Research Conference, 2000. Conference Digest. 58th DRC , vol., no., pp.99-100, 2000 doi: 10.1109/DRC.2000.877106 URL: http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=877106&isnumber=18985 | |||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | |||||||||
| ID Code: | 28242 | |||||||||
| Collection: | CaltechAUTHORS | |||||||||
| Deposited By: | Tony Diaz | |||||||||
| Deposited On: | 19 Jan 2012 19:05 | |||||||||
| Last Modified: | 09 Nov 2021 16:55 |
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