Boyd, D. A. and Cole, M. W. (2011) Growth of Compositionally Graded BST by Metal Organic Chemical Vapor Deposition. Integrated Ferroelectrics, 126 (1). pp. 17-20. ISSN 1058-4587. https://resolver.caltech.edu/CaltechAUTHORS:20111212-104658135
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Abstract
We report the growth of a compositionally stratified Ba_xSr1_(-x)TiO_3 (BST) thin film on MgO by metal organic chemical vapor deposition (MOCVD). Real-time control of the precursor flux based on UV absorption spectroscopy was used to systematically vary the ratio of Ba:Sr during deposition. The composition of the film with depth was measured by Rutherford backscattering spectroscopy, and x was found to decrease from 0.87 at the film-air interface to 0.43 near the film-MgO interface.
| Item Type: | Article | |||||||||
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| Additional Information: | © 2011 Taylor & Francis Group, LLC. Received January 3, 2011. Available online June 27, 2011. This work has been generously supported by the Army Research Office award # W911NF-07-1-0359. | |||||||||
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| Subject Keywords: | BST; ferroelectric thin films; MOCVD | |||||||||
| Issue or Number: | 1 | |||||||||
| Record Number: | CaltechAUTHORS:20111212-104658135 | |||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20111212-104658135 | |||||||||
| Official Citation: | Growth of Compositionally Graded BST by Metal Organic Chemical Vapor Deposition D. A. Boyd, M. W. Cole Integrated Ferroelectrics Vol. 126, Iss. 1, 2011 | |||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | |||||||||
| ID Code: | 28419 | |||||||||
| Collection: | CaltechAUTHORS | |||||||||
| Deposited By: | Ruth Sustaita | |||||||||
| Deposited On: | 12 Dec 2011 19:07 | |||||||||
| Last Modified: | 03 Oct 2019 03:32 |
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