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Surface-micromachined Ta-Si-N beams for use in micromechanics

Grétillat, M.-A. and Linder, C. and Dommann, A. and Staufert, G. and de Rooij, N. F. and Nicolet, M.-A. (1998) Surface-micromachined Ta-Si-N beams for use in micromechanics. Journal of Micromechanics and Microengineering, 8 (2). pp. 88-90. ISSN 0960-1317. doi:10.1088/0960-1317/8/2/011.

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Realization and characterization of free-standing surface-microstructures based on Ta-Si-N films are presented. Due to their significant physical and chemical properties, such ternary films are promising candidates for application in microelectromechanical devices.

Item Type:Article
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Additional Information:© 1998 IOP Publishing Ltd. Received 12 August 1997, accepted for publication 2 December 1997.
Subject Keywords:Electronics and devices; Instrumentation and measurement; Nanoscale science and low-D systems
Issue or Number:2
Classification Code:PACS: 85.85.+j; 07.10.Cm; 85.40.-e
Record Number:CaltechAUTHORS:20111222-090724822
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Official Citation:Surface-micromachined Ta-Si-N beams for use in micromechanics M-A Grétillat et al 1998 J. Micromech. Microeng. 8 88
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:28563
Deposited By: Tony Diaz
Deposited On:22 Dec 2011 23:29
Last Modified:12 Jul 2022 19:45

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