Grétillat, M.-A. and Linder, C. and Dommann, A. and Staufert, G. and de Rooij, N. F. and Nicolet, M.-A. (1998) Surface-micromachined Ta-Si-N beams for use in micromechanics. Journal of Micromechanics and Microengineering, 8 (2). pp. 88-90. ISSN 0960-1317. doi:10.1088/0960-1317/8/2/011. https://resolver.caltech.edu/CaltechAUTHORS:20111222-090724822
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Abstract
Realization and characterization of free-standing surface-microstructures based on Ta-Si-N films are presented. Due to their significant physical and chemical properties, such ternary films are promising candidates for application in microelectromechanical devices.
| Item Type: | Article | |||||||||
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| Additional Information: | © 1998 IOP Publishing Ltd. Received 12 August 1997, accepted for publication 2 December 1997. | |||||||||
| Subject Keywords: | Electronics and devices; Instrumentation and measurement; Nanoscale science and low-D systems | |||||||||
| Issue or Number: | 2 | |||||||||
| Classification Code: | PACS: 85.85.+j; 07.10.Cm; 85.40.-e | |||||||||
| DOI: | 10.1088/0960-1317/8/2/011 | |||||||||
| Record Number: | CaltechAUTHORS:20111222-090724822 | |||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20111222-090724822 | |||||||||
| Official Citation: | Surface-micromachined Ta-Si-N beams for use in micromechanics M-A Grétillat et al 1998 J. Micromech. Microeng. 8 88 | |||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | |||||||||
| ID Code: | 28563 | |||||||||
| Collection: | CaltechAUTHORS | |||||||||
| Deposited By: | Tony Diaz | |||||||||
| Deposited On: | 22 Dec 2011 23:29 | |||||||||
| Last Modified: | 12 Jul 2022 19:45 |
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