Nikzad, Shouleh and Hoenk, Michael E. and Greer, Frank and Jacquot, Blake and Monacos, Steve and Jones, Todd J. and Blacksberg, Jordana and Hamden, Erika and Schiminovich, David and Martin, Chris and Morrissey, Patrick (2012) Delta-doped electron-multiplied CCD with absolute quantum efficiency over 50% in the near to far ultraviolet range for single photon counting applications. Applied Optics, 51 (3). pp. 365-369. ISSN 0003-6935. doi:10.1364/AO.51.000365. https://resolver.caltech.edu/CaltechAUTHORS:20120313-152211335
![[img]](https://authors.library.caltech.edu/style/images/fileicons/application_pdf.png)
|
PDF
- Published Version
See Usage Policy. 212kB |
Use this Persistent URL to link to this item: https://resolver.caltech.edu/CaltechAUTHORS:20120313-152211335
Abstract
We have used molecular beam epitaxy (MBE) based delta-doping technology to demonstrate nearly 100% internal quantum efficiency (QE) on silicon electron-multiplied charge-coupled devices (EMCCDs) for single photon counting detection applications. We used atomic layer deposition (ALD) for antireflection (AR) coatings and achieved atomic-scale control over the interfaces and thin film materials parameters. By combining the precision control of MBE and ALD, we have demonstrated more than 50% external QE in the far and near ultraviolet in megapixel arrays. We have demonstrated that other important device performance parameters such as dark current are unchanged after these processes. In this paper, we briefly review ultraviolet detection, report on these results, and briefly discuss the techniques and processes employed.
| Item Type: | Article | |||||||||
|---|---|---|---|---|---|---|---|---|---|---|
| Related URLs: |
| |||||||||
| ORCID: |
| |||||||||
| Additional Information: | © 2012 Optical Society of America. Received 19 July 2011; accepted 2 September 2011; posted 18 November 2011 (Doc. ID 151268); published 20 January 2012. The work presented in this paper was performed by the Jet Propulsion Laboratory (JPL), California Institute of Technology, under a contract with NASA. We gratefully acknowledge the generous collaborative effort by e2v Inc. and helpful discussions with Peter Pool, Paul Jorden, and Paul Jerram of e2v. | |||||||||
| Funders: |
| |||||||||
| Issue or Number: | 3 | |||||||||
| Classification Code: | OCIS codes: 040.0040, 160.0160, 310.0310, 250.0250, 040.7190, 040.6070 | |||||||||
| DOI: | 10.1364/AO.51.000365 | |||||||||
| Record Number: | CaltechAUTHORS:20120313-152211335 | |||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20120313-152211335 | |||||||||
| Official Citation: | Shouleh Nikzad, Michael E. Hoenk, Frank Greer, Blake Jacquot, Steve Monacos, Todd J. Jones, Jordana Blacksberg, Erika Hamden, David Schiminovich, Chris Martin, and Patrick Morrissey, "Delta-doped electron-multiplied CCD with absolute quantum efficiency over 50% in the near to far ultraviolet range for single photon counting applications," Appl. Opt. 51, 365-369 (2012) http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-3-365 | |||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | |||||||||
| ID Code: | 29710 | |||||||||
| Collection: | CaltechAUTHORS | |||||||||
| Deposited By: | Ruth Sustaita | |||||||||
| Deposited On: | 14 Mar 2012 15:15 | |||||||||
| Last Modified: | 09 Nov 2021 19:28 |
Repository Staff Only: item control page
