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Delta-doped electron-multiplied CCD with absolute quantum efficiency over 50% in the near to far ultraviolet range for single photon counting applications

Nikzad, Shouleh and Hoenk, Michael E. and Greer, Frank and Jacquot, Blake and Monacos, Steve and Jones, Todd J. and Blacksberg, Jordana and Hamden, Erika and Schiminovich, David and Martin, Chris and Morrissey, Patrick (2012) Delta-doped electron-multiplied CCD with absolute quantum efficiency over 50% in the near to far ultraviolet range for single photon counting applications. Applied Optics, 51 (3). pp. 365-369. ISSN 0003-6935. doi:10.1364/AO.51.000365. https://resolver.caltech.edu/CaltechAUTHORS:20120313-152211335

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Abstract

We have used molecular beam epitaxy (MBE) based delta-doping technology to demonstrate nearly 100% internal quantum efficiency (QE) on silicon electron-multiplied charge-coupled devices (EMCCDs) for single photon counting detection applications. We used atomic layer deposition (ALD) for antireflection (AR) coatings and achieved atomic-scale control over the interfaces and thin film materials parameters. By combining the precision control of MBE and ALD, we have demonstrated more than 50% external QE in the far and near ultraviolet in megapixel arrays. We have demonstrated that other important device performance parameters such as dark current are unchanged after these processes. In this paper, we briefly review ultraviolet detection, report on these results, and briefly discuss the techniques and processes employed.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1364/AO.51.000365DOIArticle
http://www.opticsinfobase.org/ao/abstract.cfm?uri=ao-51-3-365PublisherArticle
ORCID:
AuthorORCID
Martin, Chris0000-0002-8650-1644
Morrissey, Patrick0000-0001-8177-1023
Additional Information:© 2012 Optical Society of America. Received 19 July 2011; accepted 2 September 2011; posted 18 November 2011 (Doc. ID 151268); published 20 January 2012. The work presented in this paper was performed by the Jet Propulsion Laboratory (JPL), California Institute of Technology, under a contract with NASA. We gratefully acknowledge the generous collaborative effort by e2v Inc. and helpful discussions with Peter Pool, Paul Jorden, and Paul Jerram of e2v.
Funders:
Funding AgencyGrant Number
NASA/JPL/CaltechUNSPECIFIED
Issue or Number:3
Classification Code:OCIS codes: 040.0040, 160.0160, 310.0310, 250.0250, 040.7190, 040.6070
DOI:10.1364/AO.51.000365
Record Number:CaltechAUTHORS:20120313-152211335
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20120313-152211335
Official Citation:Shouleh Nikzad, Michael E. Hoenk, Frank Greer, Blake Jacquot, Steve Monacos, Todd J. Jones, Jordana Blacksberg, Erika Hamden, David Schiminovich, Chris Martin, and Patrick Morrissey, "Delta-doped electron-multiplied CCD with absolute quantum efficiency over 50% in the near to far ultraviolet range for single photon counting applications," Appl. Opt. 51, 365-369 (2012) http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-3-365
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:29710
Collection:CaltechAUTHORS
Deposited By: Ruth Sustaita
Deposited On:14 Mar 2012 15:15
Last Modified:09 Nov 2021 19:28

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