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Fast on-wafer electrical, mechanical, and electromechanical characterization of piezoresistive cantilever force sensors

Tosolini, G. and Villanueva, L. G. and Perez-Murano, F. and Bausells, J. (2012) Fast on-wafer electrical, mechanical, and electromechanical characterization of piezoresistive cantilever force sensors. Review of Scientific Instruments, 83 (1). 015002. ISSN 0034-6748. https://resolver.caltech.edu/CaltechAUTHORS:20120330-143523064

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Abstract

Validation of a technological process requires an intensive characterization of the performance of the resulting devices, circuits, or systems. The technology for the fabrication of micro and nanoelectromechanical systems (MEMS and NEMS) is evolving rapidly, with new kind of device concepts for applications like sensing or harvesting are being proposed and demonstrated. However, the characterization tools and methods for these new devices are still not fully developed. Here, we present an on-wafer, highly precise, and rapid characterization method to measure the mechanical, electrical, and electromechanical properties of piezoresistive cantilevers. The setup is based on a combination of probe-card and atomic force microscopy technology, it allows accessing many devices across a wafer and it can be applied to a broad range of MEMS and NEMS. Using this setup we have characterized the performance of multiple submicron thick piezoresistive cantilever force sensors. For the best design we have obtained a force sensitivity ℜ_F = 158μV/nN, a noise of 5.8 μV (1 Hz–1 kHz) and a minimum detectable force of 37 pN with a relative standard deviation of σ_r ≈ 8%. This small value of σr, together with a high fabrication yield >95%, validates our fabrication technology. These devices are intended to be used as bio-molecular detectors for the measurement of intermolecular forces between ligand and receptor molecule pairs.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1063/1.3673603DOIUNSPECIFIED
http://link.aip.org/link/doi/10.1063/1.3673603PublisherUNSPECIFIED
Additional Information:© 2012 American Institute of Physics. Received 1 July 2011; accepted 6 December 2011; published online 11 January 2012. The authors would like to thank Jordi Sacristán Riquelme and Carlos José Camargo Barbosa for the useful discussions during the development of the setup for the noise measurements and for the beam bending technique, respectively. This work has been supported by MICINN through projects TEC2011-23600 and NANOSELECT-CSD2007-00041 (Consolider-Ingenio 2010 Programme).
Funders:
Funding AgencyGrant Number
MICINN (Spain)TEC2011-23600
MICINN (Spain)NANOSELECT-CSD2007- 00041
Subject Keywords:atomic force microscopy, cantilevers, electromechanical effects, force sensors, intermolecular forces, microfabrication, microsensors, nanosensors, piezoresistive devices
Issue or Number:1
Classification Code:PACS: 07.10.Cm, 07.10.Pz, 85.85.+j, 07.07.Df
Record Number:CaltechAUTHORS:20120330-143523064
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20120330-143523064
Official Citation:Fast on-wafer electrical, mechanical, and electromechanical characterization of piezoresistive cantilever force sensors G. Tosolini, L. G. Villanueva, F. Perez-Murano, and J. Bausells, Rev. Sci. Instrum. 83, 015002 (2012), DOI:10.1063/1.3673603
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:29920
Collection:CaltechAUTHORS
Deposited By: Jason Perez
Deposited On:02 Apr 2012 22:03
Last Modified:03 Oct 2019 03:45

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