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Electrolysis-based diaphragm actuators

Pang, C. and Tai, Y.-C. and Burdick, J. W. and Andersen, R. A. (2006) Electrolysis-based diaphragm actuators. Nanotechnology, 17 (4). S64-s68. ISSN 0957-4484. doi:10.1088/0957-4484/17/4/010. https://resolver.caltech.edu/CaltechAUTHORS:PANnano06

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Abstract

This work presents a new electrolysis-based microelectromechanical systems (MEMS) diaphragm actuator. Electrolysis is a technique for converting electrical energy to pneumatic energy. Theoretically electrolysis can achieve a strain of 136 000% and is capable of generating a pressure above 200 MPa. Electrolysis actuators require modest electrical power and produce minimal heat. Due to the large volume expansion obtained via electrolysis, small actuators can create a large force. Up to 100 µm of movement was achieved by a 3 mm diaphragm. The actuator operates at room temperature and has a latching and reversing capability.


Item Type:Article
Related URLs:
URLURL TypeDescription
https://doi.org/10.1088/0957-4484/17/4/010DOIArticle
ORCID:
AuthorORCID
Tai, Y.-C.0000-0001-8529-106X
Andersen, R. A.0000-0002-7947-0472
Additional Information:© Institute of Physics and IOP Publishing Limited 2006. Received 25 July 2005, Published 25 January 2006, Print publication: Issue 4 (28 February 2006) We wish to acknowledge the support of the National Institutes of Health and thank Mr Trevor Roper for assistance with fabrication. SPECIAL SECTION: SELECTED PAPERS FROM THE INTERNATIONAL CONFERENCE ON BIO-NANO-INFORMATICS FUSION (BNI FUSION 2005), MARINA DEL REY, CA. USA, 20–22 JULY 2005
Funders:
Funding AgencyGrant Number
NIHUNSPECIFIED
Issue or Number:4
DOI:10.1088/0957-4484/17/4/010
Record Number:CaltechAUTHORS:PANnano06
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:PANnano06
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:3100
Collection:CaltechAUTHORS
Deposited By: Archive Administrator
Deposited On:15 May 2006
Last Modified:12 Jul 2022 19:42

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