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Large-Scale Integration of Nanoelectromechanical Systems for Gas Sensing Applications

Bargatin, I. and Myers, E. B. and Aldridge, J. S. and Marcoux, C. and Brianceau, P. and Duraffourg, L. and Colinet, E. and Hentz, S. and Andreucci, P. and Roukes, M. L. (2012) Large-Scale Integration of Nanoelectromechanical Systems for Gas Sensing Applications. Nano Letters, 12 (3). pp. 1269-1274. ISSN 1530-6984. PMCID PMC3839335. doi:10.1021/nl2037479.

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We have developed arrays of nanomechanical systems (NEMS) by large-scale integration, comprising thousands of individual nanoresonators with densities of up to 6 million NEMS per square centimeter. The individual NEMS devices are electrically coupled using a combined series-parallel configuration that is extremely robust with respect to lithographical defects and mechanical or electrostatic-discharge damage. Given the large number of connected nanoresonators, the arrays are able to handle extremely high input powers (>1 W per array, corresponding to <1 mW per nanoresonator) without excessive heating or deterioration of resonance response. We demonstrate the utility of integrated NEMS arrays as high-performance chemical vapor sensors, detecting a part-per-billion concentration of a chemical warfare simulant within only a 2 s exposure period.

Item Type:Article
Related URLs:
URLURL TypeDescription CentralArticle
Duraffourg, L.0000-0002-9829-9295
Hentz, S.0000-0003-0479-9027
Roukes, M. L.0000-0002-2916-6026
Additional Information:© 2012 American Chemical Society. Received: October 24, 2011. Revised: January 3, 2012. Publication Date (Web): January 26, 2012. The authors thank R. Karabalin for help with optical measurements. We gratefully acknowledge support from the Defense Advanced Research Projects Agency via DARPA/MTO-MGA Grant NBCH1050001, as well as support from the Institut Carnot via the Carnot-NEMS project.
Group:Kavli Nanoscience Institute
Funding AgencyGrant Number
Defense Advanced Research Projects Agency (DARPA)NBCH1050001
Institut CarnotUNSPECIFIED
Subject Keywords:NEMS arrays; gas chromatography; gas detectors; mass sensing
Issue or Number:3
PubMed Central ID:PMC3839335
Record Number:CaltechAUTHORS:20120507-113502115
Persistent URL:
Official Citation:Large-Scale Integration of Nanoelectromechanical Systems for Gas Sensing Applications. I. Bargatin, E. B. Myers, J. S. Aldridge, C. Marcoux, P. Brianceau, L. Duraffourg, E. Colinet, S. Hentz, P. Andreucci, and M. L. Roukes Nano Letters 2012 12 (3), 1269-1274
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:31331
Deposited By: Ruth Sustaita
Deposited On:08 May 2012 16:54
Last Modified:09 Nov 2021 19:51

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