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IC-processed micro-motors: design, technology, and testing

Tai, Yu-Chong and Fan, Long-Sheng and Muller, Richard S. (1989) IC-processed micro-motors: design, technology, and testing. In: 1989 Micro electro mechanical systems: an investigation of micro structures, sensors, actuators, machines and robots. IEEE , Piscataway, NJ, pp. 1-6.

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Micro-motors having rotors with diameters between 60 and 120 μm have been fabricated and driven electrostatically to continuous rotation. These motors were built using processes derived from IC (integrated circuit) microcircuit fabrication techniques. Initial tests on the motors show that friction plays a dominant role in their dynamic behavior. Observed rotational speeds have thus far been limited to several hundred r.p.m., which is a small fraction of what would be achievable if only natural frequency were to limit the response. Experimental starting voltages are at least an order of magnitude larger than had been expected (60 V at minimum and above 100 V for some structures). Observations of asynchronous as well as synchronous rotation between the driving fields and the rotors can be explained in terms of the torque/rotor-angle characteristics for the motors.

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Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 1989 IEEE. Date of Current Version: 06 August 2002. We thank Profs. D.J. Angelakos, R.M. White, D. Giandomenico, and Paul T. Yang for valuable discussion, and K. Voros, R. Hamilton, and the staff of the Berkeley Microfabrication Laboratory for assistance in processing.
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INSPEC Accession Number3416717
Record Number:CaltechAUTHORS:20120517-094304531
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Official Citation:Tai, Y.-C.; Fan, L.-S.; Muller, R.S.; , "IC-processed micro-motors: design, technology, and testing ," Micro Electro Mechanical Systems, 1989, Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE , vol., no., pp.1-6, 20-22 Feb 1989 doi: 10.1109/MEMSYS.1989.77950 URL:
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:31523
Deposited By: Tony Diaz
Deposited On:09 Mar 2020 14:56
Last Modified:09 Nov 2021 19:54

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