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Stress-Induced Variations in the Stiffness of Micro- and Nanocantilever Beams

Karabalin, R. B. and Villanueva, L. G. and Matheny, M. H. and Sader, J. E. and Roukes, M. L. (2012) Stress-Induced Variations in the Stiffness of Micro- and Nanocantilever Beams. Physical Review Letters, 108 (23). Art. No. 236101. ISSN 0031-9007. PMCID PMC3839317. doi:10.1103/PhysRevLett.108.236101.

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The effect of surface stress on the stiffness of cantilever beams remains an outstanding problem in the physical sciences. While numerous experimental studies report significant stiffness change due to surface stress, theoretical predictions are unable to rigorously and quantitatively reconcile these observations. In this Letter, we present the first controlled measurements of stress-induced change in cantilever stiffness with commensurate theoretical quantification. Simultaneous measurements are also performed on equivalent clamped-clamped beams. All experimental results are quantitatively and accurately predicted using elasticity theory. We also present conclusive experimental evidence for invalidity of the longstanding and unphysical axial force model, which has been widely applied to interpret measurements using cantilever beams. Our findings will be of value in the development of micro- and nanoscale resonant mechanical sensors.

Item Type:Article
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URLURL TypeDescription CentralArticle Paper
Matheny, M. H.0000-0002-3488-1083
Sader, J. E.0000-0002-7096-0627
Roukes, M. L.0000-0002-2916-6026
Additional Information:© 2012 American Physical Society. Received 1 November 2011; published 5 June 2012. We would like to thank X. L. Feng, J. Xiang, and M. J. Lachut for useful suggestions and discussions. We would also like to thank E. Defaÿ, G. Le Rhun, and C. Marcoux from CEA-LETI for providing us with Aluminum Nitride material. L. G.V. acknowledges financial support from the European Commission (PIOF-GA-2008-220682) and Professor A. Boisen. J. E. S. acknowledges support from the Australian Research Council grants scheme.
Funding AgencyGrant Number
Marie Curie FellowshipPIOF-GA-2008-220682
Professor A. BoisenUNSPECIFIED
Australian Research CouncilUNSPECIFIED
Issue or Number:23
Classification Code:PACS: 68.37.Ps; 85.85.+j
PubMed Central ID:PMC3839317
Record Number:CaltechAUTHORS:20120711-110835143
Persistent URL:
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:32351
Deposited On:11 Jul 2012 20:16
Last Modified:09 Nov 2021 21:26

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