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Two-dimensional electron-gas actuation and transduction for GaAs nanoelectromechanical systems

Tang, H. X. and Huang, X. M. H. and Roukes, M. L. and Bichler, M. and Wegscheider, W. (2002) Two-dimensional electron-gas actuation and transduction for GaAs nanoelectromechanical systems. Applied Physics Letters, 81 (20). pp. 3879-3881. ISSN 0003-6951. https://resolver.caltech.edu/CaltechAUTHORS:TANapl02

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Abstract

We have fabricated doubly clamped beams from GaAs/AlGaAs quantum-well heterostructures containing a high-mobility two-dimensional electron gas (2DEG). Applying an rf drive to in-plane side gates excites the beam's mechanical resonance through a dipole–dipole mechanism. Sensitive high-frequency displacement transduction is achieved by measuring the ac emf developed across the 2DEG in the presence of a constant dc sense current. The high mobility of the incorporated 2DEG provides low-noise, low-power, and high-gain electromechanical displacement sensing through combined piezoelectric and piezoresistive mechanisms.


Item Type:Article
Related URLs:
URLURL TypeDescription
https://doi.org/10.1063/1.1516237DOIUNSPECIFIED
ORCID:
AuthorORCID
Roukes, M. L.0000-0002-2916-6026
Additional Information:© 2002 American Institute of Physics. (Received 7 March 2002; accepted 30 August 2002) We gratefully acknowledge support from DARPA, through Grant No. DABT63-98-1-0012, and the NSF via grant ECS-0089061. We also thank F. G. Monzon and J. Casey for early contributions to this work, and J. Y. T. Yang and K. Cooper for help with the low temperature amplifier.
Funders:
Funding AgencyGrant Number
Defense Advanced Research Projects Agency (DARPA)DABT63-98-1-0012
NSFECS-0089061
Subject Keywords:gallium arsenide; III-V semiconductors; micromechanical devices; aluminium compounds; two-dimensional electron gas; nanostructured materials; carrier mobility
Issue or Number:20
Record Number:CaltechAUTHORS:TANapl02
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:TANapl02
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:3272
Collection:CaltechAUTHORS
Deposited By: Archive Administrator
Deposited On:25 May 2006
Last Modified:02 Oct 2019 23:01

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