Tang, H. X. and Huang, X. M. H. and Roukes, M. L. and Bichler, M. and Wegscheider, W. (2002) Two-dimensional electron-gas actuation and transduction for GaAs nanoelectromechanical systems. Applied Physics Letters, 81 (20). pp. 3879-3881. ISSN 0003-6951. doi:10.1063/1.1516237. https://resolver.caltech.edu/CaltechAUTHORS:TANapl02
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Abstract
We have fabricated doubly clamped beams from GaAs/AlGaAs quantum-well heterostructures containing a high-mobility two-dimensional electron gas (2DEG). Applying an rf drive to in-plane side gates excites the beam's mechanical resonance through a dipole–dipole mechanism. Sensitive high-frequency displacement transduction is achieved by measuring the ac emf developed across the 2DEG in the presence of a constant dc sense current. The high mobility of the incorporated 2DEG provides low-noise, low-power, and high-gain electromechanical displacement sensing through combined piezoelectric and piezoresistive mechanisms.
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| Additional Information: | © 2002 American Institute of Physics. (Received 7 March 2002; accepted 30 August 2002) We gratefully acknowledge support from DARPA, through Grant No. DABT63-98-1-0012, and the NSF via grant ECS-0089061. We also thank F. G. Monzon and J. Casey for early contributions to this work, and J. Y. T. Yang and K. Cooper for help with the low temperature amplifier. | ||||||
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| Subject Keywords: | gallium arsenide; III-V semiconductors; micromechanical devices; aluminium compounds; two-dimensional electron gas; nanostructured materials; carrier mobility | ||||||
| Issue or Number: | 20 | ||||||
| DOI: | 10.1063/1.1516237 | ||||||
| Record Number: | CaltechAUTHORS:TANapl02 | ||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:TANapl02 | ||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||
| ID Code: | 3272 | ||||||
| Collection: | CaltechAUTHORS | ||||||
| Deposited By: | Archive Administrator | ||||||
| Deposited On: | 25 May 2006 | ||||||
| Last Modified: | 08 Nov 2021 19:54 |
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