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Investigation of the Au-Ge-Ni and Au-Ge-Pt system used for alloyed contacts to GaAs

Wittmer, W. and Finstad, T. and Nicolet, M-A. (1977) Investigation of the Au-Ge-Ni and Au-Ge-Pt system used for alloyed contacts to GaAs. Journal of Vacuum Science and Technology, 14 (4). pp. 935-936. ISSN 0022-5355. doi:10.1116/1.569392.

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Widely used metallization schemes for alloyed contacts to n‐type GaAs consist of a Au–Ge alloy with a cover layer of Ni or Pt. We have studied the interaction of these elements (Au–Ge and Ni, Au–Ge and Pt) upon heat treatment on an inert substrate. Our results show that Ni and Pt play an active role in contact formation. During heat treatment the Ge diffuses out of the Au into the Ni or Pt layer, respectively, where it forms stable compounds. Due to the fact that Ni and Pt act as a sink for Ge the composition and, as it is shown, the uniformity of the heat‐treated layers depend on the ratio of the amount of evaporated Ge to Ni or to Pt.

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Additional Information:© 1977 American Vacuum Society. Received 10 February 1977; accepted 28 March 1977. We are grateful to J. W. Mayer for his many fruitful comments and to R. Gorris and J. Mallory for their technical assistance. The work was supported by the Defense Advanced Research Projects Agency, the Department of Defense, and monitored by Air Force Cambridge Research Laboratories under Contract No. F19628-75-C-0113.
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Defense Advanced Research Projects Agency (DARPA)UNSPECIFIED
Department of DefenseUNSPECIFIED
Air Force Cambridge Research LaboratoriesF19628-75-C-0113
Issue or Number:4
Classification Code:PACS: 73.40.Ns, 81.40.Gh
Record Number:CaltechAUTHORS:20120802-111429967
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Official Citation:Investigation of the Au–Ge–Ni and Au–Ge–Pt system used for alloyed contacts to GaAs M. Wittmer, T. Finstad, and M‐A. Nicolet J. Vac. Sci. Technol. 14, 935 (1977);
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:32879
Deposited By: Ruth Sustaita
Deposited On:02 Aug 2012 18:30
Last Modified:09 Nov 2021 21:30

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