Huang, Yanyi and Paloczi, George T. and Poon, Joyce K. S. and Yariv, Amnon (2004) Bottom-up soft-lithographic fabrication of three-dimensional multilayer polymer integrated optical microdevices. Applied Physics Letters, 85 (15). pp. 3005-3007. ISSN 0003-6951. doi:10.1063/1.1802380. https://resolver.caltech.edu/CaltechAUTHORS:HUAapl04e
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Abstract
We develop a method to efficiently fabricate three-dimensional multilayer polymer microchips for integrated optical applications. This method uses soft lithography to mold the core structures on top of the cladding, layers. By repeating the process, a three-dimensional multilayer integrated optical microdevice, which consists of several layers of individual planar optical devices, is fabricated. We demonstrate a dual-layer microring resonator optical filter device where the devices in the different layers show essentially identical transmission responses.
Item Type: | Article | ||||||
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Additional Information: | © 2004 American Institute of Physics. Received 21 May 2004; accepted 5 August 2004. Financial support from the National Science Foundation and Defense Advanced Research Projects Agency (Dr. D. Honey and Dr. R. Athale) is gratefully acknowledged. | ||||||
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Subject Keywords: | integrated optics; optical multilayers; polymer films; lithography; optical resonators; cladding techniques; optical fibre cladding; optical fibre filters; optical planar waveguides; optical polymers; optical fibre fabrication | ||||||
Issue or Number: | 15 | ||||||
DOI: | 10.1063/1.1802380 | ||||||
Record Number: | CaltechAUTHORS:HUAapl04e | ||||||
Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:HUAapl04e | ||||||
Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||
ID Code: | 3483 | ||||||
Collection: | CaltechAUTHORS | ||||||
Deposited By: | Tony Diaz | ||||||
Deposited On: | 08 Jun 2006 | ||||||
Last Modified: | 08 Nov 2021 19:56 |
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