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Bottom-up soft-lithographic fabrication of three-dimensional multilayer polymer integrated optical microdevices

Huang, Yanyi and Paloczi, George T. and Poon, Joyce K. S. and Yariv, Amnon (2004) Bottom-up soft-lithographic fabrication of three-dimensional multilayer polymer integrated optical microdevices. Applied Physics Letters, 85 (15). pp. 3005-3007. ISSN 0003-6951. doi:10.1063/1.1802380.

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We develop a method to efficiently fabricate three-dimensional multilayer polymer microchips for integrated optical applications. This method uses soft lithography to mold the core structures on top of the cladding, layers. By repeating the process, a three-dimensional multilayer integrated optical microdevice, which consists of several layers of individual planar optical devices, is fabricated. We demonstrate a dual-layer microring resonator optical filter device where the devices in the different layers show essentially identical transmission responses.

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Additional Information:© 2004 American Institute of Physics. Received 21 May 2004; accepted 5 August 2004. Financial support from the National Science Foundation and Defense Advanced Research Projects Agency (Dr. D. Honey and Dr. R. Athale) is gratefully acknowledged.
Funding AgencyGrant Number
Defense Advanced Research Projects Agency (DARPA)UNSPECIFIED
Subject Keywords:integrated optics; optical multilayers; polymer films; lithography; optical resonators; cladding techniques; optical fibre cladding; optical fibre filters; optical planar waveguides; optical polymers; optical fibre fabrication
Issue or Number:15
Record Number:CaltechAUTHORS:HUAapl04e
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:3483
Deposited By: Tony Diaz
Deposited On:08 Jun 2006
Last Modified:08 Nov 2021 19:56

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